JPS63145106U - - Google Patents
Info
- Publication number
- JPS63145106U JPS63145106U JP3798887U JP3798887U JPS63145106U JP S63145106 U JPS63145106 U JP S63145106U JP 3798887 U JP3798887 U JP 3798887U JP 3798887 U JP3798887 U JP 3798887U JP S63145106 U JPS63145106 U JP S63145106U
- Authority
- JP
- Japan
- Prior art keywords
- optical path
- electrical signal
- pattern
- receiving
- test pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3798887U JPS63145106U (enExample) | 1987-03-16 | 1987-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3798887U JPS63145106U (enExample) | 1987-03-16 | 1987-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63145106U true JPS63145106U (enExample) | 1988-09-26 |
Family
ID=30849812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3798887U Pending JPS63145106U (enExample) | 1987-03-16 | 1987-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63145106U (enExample) |
-
1987
- 1987-03-16 JP JP3798887U patent/JPS63145106U/ja active Pending
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