JPH0530346Y2 - - Google Patents

Info

Publication number
JPH0530346Y2
JPH0530346Y2 JP1987007268U JP726887U JPH0530346Y2 JP H0530346 Y2 JPH0530346 Y2 JP H0530346Y2 JP 1987007268 U JP1987007268 U JP 1987007268U JP 726887 U JP726887 U JP 726887U JP H0530346 Y2 JPH0530346 Y2 JP H0530346Y2
Authority
JP
Japan
Prior art keywords
reticle
projection exposure
mask
exposure apparatus
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987007268U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63115213U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987007268U priority Critical patent/JPH0530346Y2/ja
Publication of JPS63115213U publication Critical patent/JPS63115213U/ja
Application granted granted Critical
Publication of JPH0530346Y2 publication Critical patent/JPH0530346Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987007268U 1987-01-20 1987-01-20 Expired - Lifetime JPH0530346Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987007268U JPH0530346Y2 (enExample) 1987-01-20 1987-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987007268U JPH0530346Y2 (enExample) 1987-01-20 1987-01-20

Publications (2)

Publication Number Publication Date
JPS63115213U JPS63115213U (enExample) 1988-07-25
JPH0530346Y2 true JPH0530346Y2 (enExample) 1993-08-03

Family

ID=30790561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987007268U Expired - Lifetime JPH0530346Y2 (enExample) 1987-01-20 1987-01-20

Country Status (1)

Country Link
JP (1) JPH0530346Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2613901B2 (ja) * 1987-12-17 1997-05-28 九州日本電気株式会社 縮小投影型露光装置

Also Published As

Publication number Publication date
JPS63115213U (enExample) 1988-07-25

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