JPH0530240B2 - - Google Patents

Info

Publication number
JPH0530240B2
JPH0530240B2 JP20907784A JP20907784A JPH0530240B2 JP H0530240 B2 JPH0530240 B2 JP H0530240B2 JP 20907784 A JP20907784 A JP 20907784A JP 20907784 A JP20907784 A JP 20907784A JP H0530240 B2 JPH0530240 B2 JP H0530240B2
Authority
JP
Japan
Prior art keywords
ion
envelope
filament
negatively charged
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20907784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6186698A (ja
Inventor
Kazutoshi Nagai
Hiroki Kuwano
Fusao Shimokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP20907784A priority Critical patent/JPS6186698A/ja
Publication of JPS6186698A publication Critical patent/JPS6186698A/ja
Publication of JPH0530240B2 publication Critical patent/JPH0530240B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP20907784A 1984-10-05 1984-10-05 収束性高速原子線源 Granted JPS6186698A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20907784A JPS6186698A (ja) 1984-10-05 1984-10-05 収束性高速原子線源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20907784A JPS6186698A (ja) 1984-10-05 1984-10-05 収束性高速原子線源

Publications (2)

Publication Number Publication Date
JPS6186698A JPS6186698A (ja) 1986-05-02
JPH0530240B2 true JPH0530240B2 (enrdf_load_stackoverflow) 1993-05-07

Family

ID=16566874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20907784A Granted JPS6186698A (ja) 1984-10-05 1984-10-05 収束性高速原子線源

Country Status (1)

Country Link
JP (1) JPS6186698A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8725459D0 (en) * 1987-10-30 1987-12-02 Nat Research Dev Corpn Generating particle beams
JP3305553B2 (ja) * 1995-11-17 2002-07-22 株式会社荏原製作所 高速原子線源

Also Published As

Publication number Publication date
JPS6186698A (ja) 1986-05-02

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