JPS6186698A - 収束性高速原子線源 - Google Patents

収束性高速原子線源

Info

Publication number
JPS6186698A
JPS6186698A JP20907784A JP20907784A JPS6186698A JP S6186698 A JPS6186698 A JP S6186698A JP 20907784 A JP20907784 A JP 20907784A JP 20907784 A JP20907784 A JP 20907784A JP S6186698 A JPS6186698 A JP S6186698A
Authority
JP
Japan
Prior art keywords
ion
envelope
filament
atomic beam
speed atomic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20907784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530240B2 (enrdf_load_stackoverflow
Inventor
一敏 長井
博喜 桑野
房男 下川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP20907784A priority Critical patent/JPS6186698A/ja
Publication of JPS6186698A publication Critical patent/JPS6186698A/ja
Publication of JPH0530240B2 publication Critical patent/JPH0530240B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP20907784A 1984-10-05 1984-10-05 収束性高速原子線源 Granted JPS6186698A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20907784A JPS6186698A (ja) 1984-10-05 1984-10-05 収束性高速原子線源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20907784A JPS6186698A (ja) 1984-10-05 1984-10-05 収束性高速原子線源

Publications (2)

Publication Number Publication Date
JPS6186698A true JPS6186698A (ja) 1986-05-02
JPH0530240B2 JPH0530240B2 (enrdf_load_stackoverflow) 1993-05-07

Family

ID=16566874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20907784A Granted JPS6186698A (ja) 1984-10-05 1984-10-05 収束性高速原子線源

Country Status (1)

Country Link
JP (1) JPS6186698A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03500829A (ja) * 1987-10-30 1991-02-21 ブリティッシュ・テクノロジー・グループ・リミテッド 原子状又は分子状粒子のソースおよび該ソースを用いた測定装置
US5739528A (en) * 1995-11-17 1998-04-14 Ebara Corporation Fast atom beam source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03500829A (ja) * 1987-10-30 1991-02-21 ブリティッシュ・テクノロジー・グループ・リミテッド 原子状又は分子状粒子のソースおよび該ソースを用いた測定装置
US5739528A (en) * 1995-11-17 1998-04-14 Ebara Corporation Fast atom beam source

Also Published As

Publication number Publication date
JPH0530240B2 (enrdf_load_stackoverflow) 1993-05-07

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