JPH0529834B2 - - Google Patents

Info

Publication number
JPH0529834B2
JPH0529834B2 JP59010090A JP1009084A JPH0529834B2 JP H0529834 B2 JPH0529834 B2 JP H0529834B2 JP 59010090 A JP59010090 A JP 59010090A JP 1009084 A JP1009084 A JP 1009084A JP H0529834 B2 JPH0529834 B2 JP H0529834B2
Authority
JP
Japan
Prior art keywords
argon
decarburization
silicon furnace
reaction
hydrocarbons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59010090A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60155881A (ja
Inventor
Kazuo Someya
Osamu Kita
Masaomi Tomomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59010090A priority Critical patent/JPS60155881A/ja
Publication of JPS60155881A publication Critical patent/JPS60155881A/ja
Publication of JPH0529834B2 publication Critical patent/JPH0529834B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00Noble gases; Compounds thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
JP59010090A 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置 Granted JPS60155881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59010090A JPS60155881A (ja) 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59010090A JPS60155881A (ja) 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置

Publications (2)

Publication Number Publication Date
JPS60155881A JPS60155881A (ja) 1985-08-15
JPH0529834B2 true JPH0529834B2 (enrdf_load_stackoverflow) 1993-05-06

Family

ID=11740629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59010090A Granted JPS60155881A (ja) 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置

Country Status (1)

Country Link
JP (1) JPS60155881A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6123909A (en) * 1997-09-04 2000-09-26 Air Liquide Japan, Ltd. Method and apparatus for purification of argon

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116691U (enrdf_load_stackoverflow) * 1989-03-01 1990-09-18
ES2870675T3 (es) 2019-05-06 2021-10-27 Schott Ag Sistema de puertas batientes y dispositivo congelador

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6123909A (en) * 1997-09-04 2000-09-26 Air Liquide Japan, Ltd. Method and apparatus for purification of argon

Also Published As

Publication number Publication date
JPS60155881A (ja) 1985-08-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term