JPS60155881A - シリコン炉からのアルゴン回収装置 - Google Patents

シリコン炉からのアルゴン回収装置

Info

Publication number
JPS60155881A
JPS60155881A JP59010090A JP1009084A JPS60155881A JP S60155881 A JPS60155881 A JP S60155881A JP 59010090 A JP59010090 A JP 59010090A JP 1009084 A JP1009084 A JP 1009084A JP S60155881 A JPS60155881 A JP S60155881A
Authority
JP
Japan
Prior art keywords
argon
decarburization
silicon furnace
hydrocarbons
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59010090A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529834B2 (enrdf_load_stackoverflow
Inventor
染矢　和夫
喜多　修
友村　政臣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59010090A priority Critical patent/JPS60155881A/ja
Publication of JPS60155881A publication Critical patent/JPS60155881A/ja
Publication of JPH0529834B2 publication Critical patent/JPH0529834B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
JP59010090A 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置 Granted JPS60155881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59010090A JPS60155881A (ja) 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59010090A JPS60155881A (ja) 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置

Publications (2)

Publication Number Publication Date
JPS60155881A true JPS60155881A (ja) 1985-08-15
JPH0529834B2 JPH0529834B2 (enrdf_load_stackoverflow) 1993-05-06

Family

ID=11740629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59010090A Granted JPS60155881A (ja) 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置

Country Status (1)

Country Link
JP (1) JPS60155881A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116691U (enrdf_load_stackoverflow) * 1989-03-01 1990-09-18
US12185848B2 (en) 2019-05-06 2025-01-07 Schott Ag Swing door system and a freezer device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1183309A (ja) * 1997-09-04 1999-03-26 Nippon Air Rikiide Kk アルゴン精製方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116691U (enrdf_load_stackoverflow) * 1989-03-01 1990-09-18
US12185848B2 (en) 2019-05-06 2025-01-07 Schott Ag Swing door system and a freezer device

Also Published As

Publication number Publication date
JPH0529834B2 (enrdf_load_stackoverflow) 1993-05-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term