JPH0528823B2 - - Google Patents

Info

Publication number
JPH0528823B2
JPH0528823B2 JP9851885A JP9851885A JPH0528823B2 JP H0528823 B2 JPH0528823 B2 JP H0528823B2 JP 9851885 A JP9851885 A JP 9851885A JP 9851885 A JP9851885 A JP 9851885A JP H0528823 B2 JPH0528823 B2 JP H0528823B2
Authority
JP
Japan
Prior art keywords
etching
transparent substrate
mask material
defect inspection
silicide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9851885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61255025A (ja
Inventor
Shuichi Matsuda
Yaichiro Watakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60098518A priority Critical patent/JPS61255025A/ja
Publication of JPS61255025A publication Critical patent/JPS61255025A/ja
Publication of JPH0528823B2 publication Critical patent/JPH0528823B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60098518A 1985-05-07 1985-05-07 欠陥検査用ウエハマスク材 Granted JPS61255025A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60098518A JPS61255025A (ja) 1985-05-07 1985-05-07 欠陥検査用ウエハマスク材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60098518A JPS61255025A (ja) 1985-05-07 1985-05-07 欠陥検査用ウエハマスク材

Publications (2)

Publication Number Publication Date
JPS61255025A JPS61255025A (ja) 1986-11-12
JPH0528823B2 true JPH0528823B2 (OSRAM) 1993-04-27

Family

ID=14221869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60098518A Granted JPS61255025A (ja) 1985-05-07 1985-05-07 欠陥検査用ウエハマスク材

Country Status (1)

Country Link
JP (1) JPS61255025A (OSRAM)

Also Published As

Publication number Publication date
JPS61255025A (ja) 1986-11-12

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