JPH0528779B2 - - Google Patents
Info
- Publication number
- JPH0528779B2 JPH0528779B2 JP5433386A JP5433386A JPH0528779B2 JP H0528779 B2 JPH0528779 B2 JP H0528779B2 JP 5433386 A JP5433386 A JP 5433386A JP 5433386 A JP5433386 A JP 5433386A JP H0528779 B2 JPH0528779 B2 JP H0528779B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- defect
- light receiving
- micro
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 64
- 238000001514 detection method Methods 0.000 claims description 11
- 238000007689 inspection Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433386A JPS62235549A (ja) | 1986-03-11 | 1986-03-11 | 表面欠陥検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433386A JPS62235549A (ja) | 1986-03-11 | 1986-03-11 | 表面欠陥検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62235549A JPS62235549A (ja) | 1987-10-15 |
| JPH0528779B2 true JPH0528779B2 (enExample) | 1993-04-27 |
Family
ID=12967671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5433386A Granted JPS62235549A (ja) | 1986-03-11 | 1986-03-11 | 表面欠陥検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62235549A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH076841A (ja) * | 1993-06-18 | 1995-01-10 | Sumitomo Electric Ind Ltd | 電気信号伝達装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0695075B2 (ja) * | 1990-03-16 | 1994-11-24 | 工業技術院長 | 表面性状検出方法 |
| US6165292A (en) * | 1990-12-18 | 2000-12-26 | Advanced Cardiovascular Systems, Inc. | Superelastic guiding member |
| CN110208283A (zh) * | 2019-05-22 | 2019-09-06 | 惠州高视科技有限公司 | 一种检测电芯表面缺陷的方法及装置 |
-
1986
- 1986-03-11 JP JP5433386A patent/JPS62235549A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH076841A (ja) * | 1993-06-18 | 1995-01-10 | Sumitomo Electric Ind Ltd | 電気信号伝達装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62235549A (ja) | 1987-10-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7016526B2 (en) | Pixel based machine for patterned wafers | |
| Kanade | Three-dimensional machine vision | |
| JP2731864B2 (ja) | 押込型硬度計 | |
| US20100021041A1 (en) | Pattern defect inspection method and apparatus | |
| EP0831296A1 (en) | Optical apparatus for rapid defect analysis | |
| US6204918B1 (en) | Apparatus for surface inspection | |
| JP2594685B2 (ja) | ウェーハスリップラインの検査方法 | |
| JPH0528779B2 (enExample) | ||
| JP4215220B2 (ja) | 表面検査方法及び表面検査装置 | |
| JP2915025B2 (ja) | 検査方法 | |
| JP2001201323A (ja) | 溝の深さ測定方法及び測定装置 | |
| JPH024028B2 (enExample) | ||
| JPH07113757A (ja) | 透光性物体の欠点検出方法 | |
| KR101711708B1 (ko) | Ｏｃｔ 영상에서 영역의 중심점 검출 방법 및 그 장치 | |
| JP3101773B2 (ja) | ウエハ異物検査装置 | |
| EP1026474A1 (en) | Method and apparatus for analyzing surfaces by means of reflected light, particularly for product quality control | |
| JPS61225604A (ja) | 寸法測定方法 | |
| JPH024029B2 (enExample) | ||
| JPH0621179A (ja) | Ｉｃチップの除去エリアの消去方法 | |
| Collins et al. | Facilitation of immunoassay through object identification | |
| McLemore et al. | Automatic surface flaw inspection of nuclear fuel pellets | |
| JPH1068608A (ja) | 高さ測定装置 | |
| JPH11153546A (ja) | 表面検査方法及び装置 | |
| JP2000161938A (ja) | 描画パターンの検査方法および装置 | |
| JPH07113686A (ja) | 光ビームプロファイル測定装置 |