JPS62235549A - 表面欠陥検出方法 - Google Patents
表面欠陥検出方法Info
- Publication number
- JPS62235549A JPS62235549A JP5433386A JP5433386A JPS62235549A JP S62235549 A JPS62235549 A JP S62235549A JP 5433386 A JP5433386 A JP 5433386A JP 5433386 A JP5433386 A JP 5433386A JP S62235549 A JPS62235549 A JP S62235549A
- Authority
- JP
- Japan
- Prior art keywords
- defect
- light
- defects
- light receiving
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 title claims abstract description 77
- 238000001514 detection method Methods 0.000 title claims abstract description 14
- 239000000284 extract Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433386A JPS62235549A (ja) | 1986-03-11 | 1986-03-11 | 表面欠陥検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433386A JPS62235549A (ja) | 1986-03-11 | 1986-03-11 | 表面欠陥検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62235549A true JPS62235549A (ja) | 1987-10-15 |
| JPH0528779B2 JPH0528779B2 (enExample) | 1993-04-27 |
Family
ID=12967671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5433386A Granted JPS62235549A (ja) | 1986-03-11 | 1986-03-11 | 表面欠陥検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62235549A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5125741A (en) * | 1990-03-16 | 1992-06-30 | Agency Of Industrial Science & Technology | Method and apparatus for inspecting surface conditions |
| US6461453B1 (en) * | 1990-12-18 | 2002-10-08 | Advanced Cardiovascular Systems, Inc. | Superelastic guiding member |
| CN110208283A (zh) * | 2019-05-22 | 2019-09-06 | 惠州高视科技有限公司 | 一种检测电芯表面缺陷的方法及装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH076841A (ja) * | 1993-06-18 | 1995-01-10 | Sumitomo Electric Ind Ltd | 電気信号伝達装置 |
-
1986
- 1986-03-11 JP JP5433386A patent/JPS62235549A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5125741A (en) * | 1990-03-16 | 1992-06-30 | Agency Of Industrial Science & Technology | Method and apparatus for inspecting surface conditions |
| US6461453B1 (en) * | 1990-12-18 | 2002-10-08 | Advanced Cardiovascular Systems, Inc. | Superelastic guiding member |
| CN110208283A (zh) * | 2019-05-22 | 2019-09-06 | 惠州高视科技有限公司 | 一种检测电芯表面缺陷的方法及装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528779B2 (enExample) | 1993-04-27 |
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