JPH0528759Y2 - - Google Patents
Info
- Publication number
- JPH0528759Y2 JPH0528759Y2 JP1985042227U JP4222785U JPH0528759Y2 JP H0528759 Y2 JPH0528759 Y2 JP H0528759Y2 JP 1985042227 U JP1985042227 U JP 1985042227U JP 4222785 U JP4222785 U JP 4222785U JP H0528759 Y2 JPH0528759 Y2 JP H0528759Y2
- Authority
- JP
- Japan
- Prior art keywords
- disc
- cleaning
- porous elastic
- cleaned
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 claims description 58
- 239000013013 elastic material Substances 0.000 claims description 12
- 239000011148 porous material Substances 0.000 claims description 12
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 claims description 8
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 claims description 8
- 229920002554 vinyl polymer Polymers 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000005553 drilling Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000004745 nonwoven fabric Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010828 elution Methods 0.000 description 2
- 239000002657 fibrous material Substances 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 2
- 229920002994 synthetic fiber Polymers 0.000 description 2
- 239000012209 synthetic fiber Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- 239000003377 acid catalyst Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- -1 polishing debris Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007127 saponification reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985042227U JPH0528759Y2 (zh) | 1985-03-23 | 1985-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985042227U JPH0528759Y2 (zh) | 1985-03-23 | 1985-03-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61158948U JPS61158948U (zh) | 1986-10-02 |
| JPH0528759Y2 true JPH0528759Y2 (zh) | 1993-07-23 |
Family
ID=30552784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985042227U Expired - Lifetime JPH0528759Y2 (zh) | 1985-03-23 | 1985-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528759Y2 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998020987A1 (fr) * | 1996-11-08 | 1998-05-22 | Kanebo Limited | Rouleau eponge pour nettoyage |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3200036B2 (ja) * | 1998-05-22 | 2001-08-20 | アイオン株式会社 | 洗浄用回転ブラシ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5659015A (en) * | 1979-10-17 | 1981-05-22 | Nippon Tokushu Kento Kk | Manufacture of polyvinyl acetal sponge roll |
| JPS598352U (ja) * | 1982-07-09 | 1984-01-19 | 能美防災工業株式会社 | 石炭などの可燃物の貯蔵所の防火装置 |
| JPS618735A (ja) * | 1984-06-22 | 1986-01-16 | Mitsubishi Chem Ind Ltd | ワ−ク洗浄装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59170852U (ja) * | 1983-04-28 | 1984-11-15 | シャープ株式会社 | フオトマスク洗浄装置 |
| JPS6096825U (ja) * | 1983-12-07 | 1985-07-02 | 株式会社東芝 | 洗浄用ブラシ |
-
1985
- 1985-03-23 JP JP1985042227U patent/JPH0528759Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5659015A (en) * | 1979-10-17 | 1981-05-22 | Nippon Tokushu Kento Kk | Manufacture of polyvinyl acetal sponge roll |
| JPS598352U (ja) * | 1982-07-09 | 1984-01-19 | 能美防災工業株式会社 | 石炭などの可燃物の貯蔵所の防火装置 |
| JPS618735A (ja) * | 1984-06-22 | 1986-01-16 | Mitsubishi Chem Ind Ltd | ワ−ク洗浄装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998020987A1 (fr) * | 1996-11-08 | 1998-05-22 | Kanebo Limited | Rouleau eponge pour nettoyage |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61158948U (zh) | 1986-10-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4566911A (en) | Method for cleaning article by scrubbing with cleaning roll | |
| US4239567A (en) | Removably holding planar articles for polishing operations | |
| KR100571689B1 (ko) | 탄성 발포체 연마 패드 및 이를 포함하는 연마 시스템 | |
| USRE36767E (en) | Wafer scrubbing device | |
| CN101266803B (zh) | 圆盘状基板的制造方法、清洗装置 | |
| EP1080797A3 (en) | Method and apparatus for cleaning workpiece | |
| JPH11625A (ja) | ウェーハの洗浄装置 | |
| US6802877B2 (en) | Polyvinyl acetal composition roller brush with abrasive outer surface | |
| KR100487589B1 (ko) | 평면 피가공물의 폴리싱과 세정방법 및 장치 | |
| JP2001070896A5 (zh) | ||
| US6578227B2 (en) | Pad for use in a critical environment | |
| JPH0528759Y2 (zh) | ||
| US20080276394A1 (en) | Scrubbing device and roll sponge assembly used therein | |
| JP2009117765A (ja) | 洗浄用スポンジローラ | |
| JP3680185B2 (ja) | 洗浄用ローラ | |
| US6568999B2 (en) | Method and apparatus for cleaning a surface of a microelectronic substrate | |
| JPS6059113B2 (ja) | 微小サイズウエ−ハの液体無ワツクス取付具 | |
| JP2004040011A (ja) | 基板の供給取出治具、供給取出装置および供給取出方法 | |
| JPS60240129A (ja) | スクラブ洗浄装置 | |
| JPS646953Y2 (zh) | ||
| JP2001121402A (ja) | コンディショニングディスク | |
| JPS61271157A (ja) | 洗車機用洗浄材 | |
| US20020155273A1 (en) | Polyvinyl acetal composition skinless roller brush | |
| WO2017073431A1 (ja) | 洗浄装置、球体の洗浄システムおよび球体の洗浄方法 | |
| WO2022186227A1 (ja) | ブラシローラ |