JPH0527502Y2 - - Google Patents
Info
- Publication number
- JPH0527502Y2 JPH0527502Y2 JP1985113338U JP11333885U JPH0527502Y2 JP H0527502 Y2 JPH0527502 Y2 JP H0527502Y2 JP 1985113338 U JP1985113338 U JP 1985113338U JP 11333885 U JP11333885 U JP 11333885U JP H0527502 Y2 JPH0527502 Y2 JP H0527502Y2
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- vapor phase
- bell gear
- phase growth
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985113338U JPH0527502Y2 (pm) | 1985-07-23 | 1985-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985113338U JPH0527502Y2 (pm) | 1985-07-23 | 1985-07-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6221080U JPS6221080U (pm) | 1987-02-07 |
| JPH0527502Y2 true JPH0527502Y2 (pm) | 1993-07-13 |
Family
ID=30995050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985113338U Expired - Lifetime JPH0527502Y2 (pm) | 1985-07-23 | 1985-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527502Y2 (pm) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5116693U (pm) * | 1974-07-24 | 1976-02-06 |
-
1985
- 1985-07-23 JP JP1985113338U patent/JPH0527502Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6221080U (pm) | 1987-02-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1386981B1 (en) | A thin film-forming apparatus | |
| JPH02186622A (ja) | サセプタ | |
| JPH04218916A (ja) | 熱処理装置 | |
| JPH06247789A (ja) | 単結晶引上げ装置用不活性ガス整流・吹付け装置 | |
| CN116555904A (zh) | 一种用于硅片外延生长的基座以及装置 | |
| JPH09219369A (ja) | 半導体装置の製造装置および製造方法 | |
| JPH0527502Y2 (pm) | ||
| JPS63144513A (ja) | バレル型エピタキシヤル成長装置 | |
| JPH07277887A (ja) | 単結晶の製造装置および製造方法 | |
| JP2681115B2 (ja) | 単結晶製造方法 | |
| JP2004134625A (ja) | 半導体装置の製造方法と製造装置 | |
| JPS6058613A (ja) | エピタキシャル装置 | |
| JPH0530350Y2 (pm) | ||
| JPH02212393A (ja) | 気相成長方法及びその装置 | |
| JPH07111958B2 (ja) | 半導体のエピタキシャル成長方法 | |
| JPS58169906A (ja) | 気相成長装置 | |
| JPH01129973A (ja) | 反応処理装置 | |
| JP3613099B2 (ja) | 気相成長装置 | |
| JP2730155B2 (ja) | 気相成長装置 | |
| JPH0632676Y2 (ja) | 気相成長装置 | |
| JPS63319288A (ja) | 鍔付石英るつぼ | |
| JPH06124909A (ja) | 縦型熱処理装置 | |
| JPS624314A (ja) | 気相成長装置用サセプタ | |
| JPH0614475Y2 (ja) | 半導体製造装置 | |
| JPH0354193A (ja) | 有機金属気相成長装置 |