JPH0527499Y2 - - Google Patents

Info

Publication number
JPH0527499Y2
JPH0527499Y2 JP1986081439U JP8143986U JPH0527499Y2 JP H0527499 Y2 JPH0527499 Y2 JP H0527499Y2 JP 1986081439 U JP1986081439 U JP 1986081439U JP 8143986 U JP8143986 U JP 8143986U JP H0527499 Y2 JPH0527499 Y2 JP H0527499Y2
Authority
JP
Japan
Prior art keywords
melt
column
holder
epitaxial growth
slide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986081439U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62194766U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986081439U priority Critical patent/JPH0527499Y2/ja
Publication of JPS62194766U publication Critical patent/JPS62194766U/ja
Application granted granted Critical
Publication of JPH0527499Y2 publication Critical patent/JPH0527499Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1986081439U 1986-05-29 1986-05-29 Expired - Lifetime JPH0527499Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986081439U JPH0527499Y2 (cs) 1986-05-29 1986-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986081439U JPH0527499Y2 (cs) 1986-05-29 1986-05-29

Publications (2)

Publication Number Publication Date
JPS62194766U JPS62194766U (cs) 1987-12-11
JPH0527499Y2 true JPH0527499Y2 (cs) 1993-07-13

Family

ID=30933178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986081439U Expired - Lifetime JPH0527499Y2 (cs) 1986-05-29 1986-05-29

Country Status (1)

Country Link
JP (1) JPH0527499Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310042B2 (cs) * 1974-09-06 1978-04-11

Also Published As

Publication number Publication date
JPS62194766U (cs) 1987-12-11

Similar Documents

Publication Publication Date Title
JPH0527499Y2 (cs)
DE2401382A1 (de) Vorrichtung zur automatischen durchfuehrung einer duennschicht-chromatografie
EP0000123B1 (de) Verfahren zum Abscheiden einkristalliner Schichten nach der Flüssigphasen-Schiebeepitaxie.
JPS55163835A (en) Selective liquid phase growth of on semiconductor region
JPS626684Y2 (cs)
JPS5919920B2 (ja) 液相エピタキシヤル成長装置
JPS60144239A (ja) 縦積み部品の分離機構
JPS63177960U (cs)
JPH01115892A (ja) 液相成長装置
JPS5918644A (ja) 液相エピタキシヤル成長装置
DE3731010A1 (de) Verfahren zur fluessigphasenepitaxie
JPS6123010Y2 (cs)
JPS5941960B2 (ja) 液相成長装置
JPH02102191A (ja) 半導体結晶成長方法
JPS5926998A (ja) 液相エピタキシヤル成長方法
JPS6174331A (ja) 液相エピタキシヤル成長装置
DE2233734C3 (de) Verfahren und Vorrichtung zum epitaktischen Aufwachsen einer Einkristallschicht auf einem einkristallinen Substrat durch Flüssigphasen-Epitaxie
JPH027464Y2 (cs)
JPS5827239B2 (ja) 半導体結晶の製造装置
JPS52135264A (en) Liquid phase epitaxial growth method
JPS5485188A (en) Liquid phase growing device
JP2545761B2 (ja) 液相エピタキシャル成長方法
JPS5482166A (en) Liquid-phase grow device for semiconductor
JPH04149093A (ja) スライド式液相エピタキシャル成長装置
JPH01126299A (ja) 液相エピタキシャル成長装置