JPH0527482Y2 - - Google Patents
Info
- Publication number
- JPH0527482Y2 JPH0527482Y2 JP10876487U JP10876487U JPH0527482Y2 JP H0527482 Y2 JPH0527482 Y2 JP H0527482Y2 JP 10876487 U JP10876487 U JP 10876487U JP 10876487 U JP10876487 U JP 10876487U JP H0527482 Y2 JPH0527482 Y2 JP H0527482Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- piece
- groove
- stirring
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003756 stirring Methods 0.000 claims description 37
- 230000003750 conditioning effect Effects 0.000 claims description 8
- 238000005553 drilling Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876487U JPH0527482Y2 (xx) | 1987-07-14 | 1987-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876487U JPH0527482Y2 (xx) | 1987-07-14 | 1987-07-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6414158U JPS6414158U (xx) | 1989-01-25 |
| JPH0527482Y2 true JPH0527482Y2 (xx) | 1993-07-13 |
Family
ID=31344405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10876487U Expired - Lifetime JPH0527482Y2 (xx) | 1987-07-14 | 1987-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527482Y2 (xx) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220027770A (ko) | 2020-08-27 | 2022-03-08 | ㈜엔케이이노베이션 | 휴대용 냉각시스템이 적용된 방호복의 밀폐구조 |
| KR20220027759A (ko) | 2020-08-27 | 2022-03-08 | ㈜엔케이이노베이션 | 방호복용 휴대용 냉각시스템 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4987633B2 (ja) * | 2007-08-31 | 2012-07-25 | 株式会社東芝 | 微粒子担持方法及び微粒子担持装置 |
| JP4987634B2 (ja) * | 2007-08-31 | 2012-07-25 | 株式会社東芝 | 微粒子担持方法及び担持装置 |
| JP5604234B2 (ja) * | 2010-09-07 | 2014-10-08 | アルバック理工株式会社 | 微粒子形成装置およびその方法 |
-
1987
- 1987-07-14 JP JP10876487U patent/JPH0527482Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220027770A (ko) | 2020-08-27 | 2022-03-08 | ㈜엔케이이노베이션 | 휴대용 냉각시스템이 적용된 방호복의 밀폐구조 |
| KR20220027759A (ko) | 2020-08-27 | 2022-03-08 | ㈜엔케이이노베이션 | 방호복용 휴대용 냉각시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6414158U (xx) | 1989-01-25 |
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