JPH0527249B2 - - Google Patents

Info

Publication number
JPH0527249B2
JPH0527249B2 JP58172191A JP17219183A JPH0527249B2 JP H0527249 B2 JPH0527249 B2 JP H0527249B2 JP 58172191 A JP58172191 A JP 58172191A JP 17219183 A JP17219183 A JP 17219183A JP H0527249 B2 JPH0527249 B2 JP H0527249B2
Authority
JP
Japan
Prior art keywords
glass
etching
etching rate
lead
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58172191A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6064437A (ja
Inventor
Masaru Shinho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58172191A priority Critical patent/JPS6064437A/ja
Publication of JPS6064437A publication Critical patent/JPS6064437A/ja
Publication of JPH0527249B2 publication Critical patent/JPH0527249B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Weting (AREA)
JP58172191A 1983-09-20 1983-09-20 鉛系パツシベ−シヨンガラスのエツチング液 Granted JPS6064437A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58172191A JPS6064437A (ja) 1983-09-20 1983-09-20 鉛系パツシベ−シヨンガラスのエツチング液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58172191A JPS6064437A (ja) 1983-09-20 1983-09-20 鉛系パツシベ−シヨンガラスのエツチング液

Publications (2)

Publication Number Publication Date
JPS6064437A JPS6064437A (ja) 1985-04-13
JPH0527249B2 true JPH0527249B2 (https=) 1993-04-20

Family

ID=15937259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58172191A Granted JPS6064437A (ja) 1983-09-20 1983-09-20 鉛系パツシベ−シヨンガラスのエツチング液

Country Status (1)

Country Link
JP (1) JPS6064437A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000164586A (ja) 1998-11-24 2000-06-16 Daikin Ind Ltd エッチング液
US6692976B1 (en) * 2000-08-31 2004-02-17 Agilent Technologies, Inc. Post-etch cleaning treatment
FR3068509B1 (fr) 2017-06-30 2020-02-28 Technic France Composition chimique de nettoyage pour le retrait d'une couche de passivation amorphe a la surface de materiaux cristallins

Also Published As

Publication number Publication date
JPS6064437A (ja) 1985-04-13

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