JPH0526736Y2 - - Google Patents
Info
- Publication number
- JPH0526736Y2 JPH0526736Y2 JP7810885U JP7810885U JPH0526736Y2 JP H0526736 Y2 JPH0526736 Y2 JP H0526736Y2 JP 7810885 U JP7810885 U JP 7810885U JP 7810885 U JP7810885 U JP 7810885U JP H0526736 Y2 JPH0526736 Y2 JP H0526736Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- line
- vent
- growth furnace
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002994 raw material Substances 0.000 claims description 29
- 239000002131 composite material Substances 0.000 claims description 2
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 47
- 239000012159 carrier gas Substances 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 239000012808 vapor phase Substances 0.000 description 3
- 238000002109 crystal growth method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7810885U JPH0526736Y2 (ko) | 1985-05-24 | 1985-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7810885U JPH0526736Y2 (ko) | 1985-05-24 | 1985-05-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61195043U JPS61195043U (ko) | 1986-12-04 |
| JPH0526736Y2 true JPH0526736Y2 (ko) | 1993-07-07 |
Family
ID=30621789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7810885U Expired - Lifetime JPH0526736Y2 (ko) | 1985-05-24 | 1985-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526736Y2 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060156980A1 (en) * | 2005-01-19 | 2006-07-20 | Samsung Electronics Co., Ltd. | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus |
| EP3682909B1 (en) | 2017-09-15 | 2024-08-07 | Sony Group Corporation | Fragrance retention structure and aroma providing device |
-
1985
- 1985-05-24 JP JP7810885U patent/JPH0526736Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61195043U (ko) | 1986-12-04 |
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