JPH0526484Y2 - - Google Patents
Info
- Publication number
- JPH0526484Y2 JPH0526484Y2 JP13098187U JP13098187U JPH0526484Y2 JP H0526484 Y2 JPH0526484 Y2 JP H0526484Y2 JP 13098187 U JP13098187 U JP 13098187U JP 13098187 U JP13098187 U JP 13098187U JP H0526484 Y2 JPH0526484 Y2 JP H0526484Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- optical fiber
- tip
- electrons
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013307 optical fiber Substances 0.000 claims description 39
- 238000001514 detection method Methods 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000000835 fiber Substances 0.000 description 17
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 230000006698 induction Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13098187U JPH0526484Y2 (cg-RX-API-DMAC10.html) | 1987-08-28 | 1987-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13098187U JPH0526484Y2 (cg-RX-API-DMAC10.html) | 1987-08-28 | 1987-08-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6437687U JPS6437687U (cg-RX-API-DMAC10.html) | 1989-03-07 |
| JPH0526484Y2 true JPH0526484Y2 (cg-RX-API-DMAC10.html) | 1993-07-05 |
Family
ID=31386630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13098187U Expired - Lifetime JPH0526484Y2 (cg-RX-API-DMAC10.html) | 1987-08-28 | 1987-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526484Y2 (cg-RX-API-DMAC10.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5852474B2 (ja) * | 2012-03-01 | 2016-02-03 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
-
1987
- 1987-08-28 JP JP13098187U patent/JPH0526484Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6437687U (cg-RX-API-DMAC10.html) | 1989-03-07 |
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