JPH0526338B2 - - Google Patents

Info

Publication number
JPH0526338B2
JPH0526338B2 JP59149556A JP14955684A JPH0526338B2 JP H0526338 B2 JPH0526338 B2 JP H0526338B2 JP 59149556 A JP59149556 A JP 59149556A JP 14955684 A JP14955684 A JP 14955684A JP H0526338 B2 JPH0526338 B2 JP H0526338B2
Authority
JP
Japan
Prior art keywords
blade
cover
water
wafer
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59149556A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6129150A (ja
Inventor
Takashi Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Package and Test Solutions Co Ltd
Original Assignee
Hitachi Hokkai Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Hokkai Semiconductor Ltd filed Critical Hitachi Hokkai Semiconductor Ltd
Priority to JP14955684A priority Critical patent/JPS6129150A/ja
Publication of JPS6129150A publication Critical patent/JPS6129150A/ja
Publication of JPH0526338B2 publication Critical patent/JPH0526338B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
JP14955684A 1984-07-20 1984-07-20 ダイシング装置 Granted JPS6129150A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14955684A JPS6129150A (ja) 1984-07-20 1984-07-20 ダイシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14955684A JPS6129150A (ja) 1984-07-20 1984-07-20 ダイシング装置

Publications (2)

Publication Number Publication Date
JPS6129150A JPS6129150A (ja) 1986-02-10
JPH0526338B2 true JPH0526338B2 (enExample) 1993-04-15

Family

ID=15477746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14955684A Granted JPS6129150A (ja) 1984-07-20 1984-07-20 ダイシング装置

Country Status (1)

Country Link
JP (1) JPS6129150A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4634820B2 (ja) * 2005-02-24 2011-02-16 株式会社ディスコ 切削装置
JP6460763B2 (ja) * 2014-12-09 2019-01-30 株式会社ディスコ 切削装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713932U (enExample) * 1980-06-25 1982-01-25
JPS5725365A (en) * 1980-07-22 1982-02-10 Showa Kagaku Kogyo Kk Dyestuff salt-containing fluorescent brightener composition

Also Published As

Publication number Publication date
JPS6129150A (ja) 1986-02-10

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