JPH0526334B2 - - Google Patents

Info

Publication number
JPH0526334B2
JPH0526334B2 JP58066144A JP6614483A JPH0526334B2 JP H0526334 B2 JPH0526334 B2 JP H0526334B2 JP 58066144 A JP58066144 A JP 58066144A JP 6614483 A JP6614483 A JP 6614483A JP H0526334 B2 JPH0526334 B2 JP H0526334B2
Authority
JP
Japan
Prior art keywords
wiring
insulating film
film
electrode
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58066144A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59189678A (ja
Inventor
Hidetake Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6614483A priority Critical patent/JPS59189678A/ja
Publication of JPS59189678A publication Critical patent/JPS59189678A/ja
Publication of JPH0526334B2 publication Critical patent/JPH0526334B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP6614483A 1983-04-13 1983-04-13 半導体装置とその製造方法 Granted JPS59189678A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6614483A JPS59189678A (ja) 1983-04-13 1983-04-13 半導体装置とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6614483A JPS59189678A (ja) 1983-04-13 1983-04-13 半導体装置とその製造方法

Publications (2)

Publication Number Publication Date
JPS59189678A JPS59189678A (ja) 1984-10-27
JPH0526334B2 true JPH0526334B2 (enrdf_load_stackoverflow) 1993-04-15

Family

ID=13307368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6614483A Granted JPS59189678A (ja) 1983-04-13 1983-04-13 半導体装置とその製造方法

Country Status (1)

Country Link
JP (1) JPS59189678A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2770341B2 (ja) * 1988-09-19 1998-07-02 ソニー株式会社 半導体装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57102014A (en) * 1980-12-17 1982-06-24 Toshiba Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS59189678A (ja) 1984-10-27

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