JPH0525801B2 - - Google Patents

Info

Publication number
JPH0525801B2
JPH0525801B2 JP2203036A JP20303690A JPH0525801B2 JP H0525801 B2 JPH0525801 B2 JP H0525801B2 JP 2203036 A JP2203036 A JP 2203036A JP 20303690 A JP20303690 A JP 20303690A JP H0525801 B2 JPH0525801 B2 JP H0525801B2
Authority
JP
Japan
Prior art keywords
argon
stage
pressure
stage device
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2203036A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03164410A (ja
Inventor
Hiroo Tsucha
Saburo Hayashi
Kazuo Haruna
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Seika Chemicals Co Ltd
Original Assignee
Sumitomo Seika Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Seika Chemicals Co Ltd filed Critical Sumitomo Seika Chemicals Co Ltd
Priority to JP2203036A priority Critical patent/JPH03164410A/ja
Publication of JPH03164410A publication Critical patent/JPH03164410A/ja
Publication of JPH0525801B2 publication Critical patent/JPH0525801B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP2203036A 1990-07-30 1990-07-30 高濃度アルゴンの製造方法 Granted JPH03164410A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2203036A JPH03164410A (ja) 1990-07-30 1990-07-30 高濃度アルゴンの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2203036A JPH03164410A (ja) 1990-07-30 1990-07-30 高濃度アルゴンの製造方法

Publications (2)

Publication Number Publication Date
JPH03164410A JPH03164410A (ja) 1991-07-16
JPH0525801B2 true JPH0525801B2 (enrdf_load_stackoverflow) 1993-04-14

Family

ID=16467289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2203036A Granted JPH03164410A (ja) 1990-07-30 1990-07-30 高濃度アルゴンの製造方法

Country Status (1)

Country Link
JP (1) JPH03164410A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5601634A (en) * 1993-09-30 1997-02-11 The Boc Group, Inc. Purification of fluids by adsorption
JPH08165104A (ja) * 1994-12-09 1996-06-25 Kanebo Ltd 高純度酸素ガスの分離法
KR20020051314A (ko) * 2000-12-22 2002-06-29 이구택 활성탄을 이용한 고순도 아르곤가스 정제방법
TWI476038B (zh) * 2010-02-10 2015-03-11 Sumitomo Seika Chemicals 氬氣之純化方法及純化裝置
TWI478761B (zh) * 2010-02-25 2015-04-01 Sumitomo Seika Chemicals 氬氣之純化方法及純化裝置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1551824A (en) * 1975-07-17 1979-09-05 Boc Ltd Gas separation
NZ183389A (en) * 1976-02-27 1979-10-25 Boc Ltd Gas separation by pressure swing adsorption: feed mixture supplied in substantially unpressurized condition
JPS58167411A (ja) * 1982-03-25 1983-10-03 Nippon Sanso Kk アルゴンの製造方法

Also Published As

Publication number Publication date
JPH03164410A (ja) 1991-07-16

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