JPH03164410A - 高濃度アルゴンの製造方法 - Google Patents

高濃度アルゴンの製造方法

Info

Publication number
JPH03164410A
JPH03164410A JP2203036A JP20303690A JPH03164410A JP H03164410 A JPH03164410 A JP H03164410A JP 2203036 A JP2203036 A JP 2203036A JP 20303690 A JP20303690 A JP 20303690A JP H03164410 A JPH03164410 A JP H03164410A
Authority
JP
Japan
Prior art keywords
argon
stage
molecular sieve
oxygen
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2203036A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525801B2 (enrdf_load_stackoverflow
Inventor
Hiroo Tsuchiya
土屋 宏夫
Saburo Hayashi
三郎 林
Kazuo Haruna
一生 春名
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Seika Chemicals Co Ltd
Original Assignee
Sumitomo Seika Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Seika Chemicals Co Ltd filed Critical Sumitomo Seika Chemicals Co Ltd
Priority to JP2203036A priority Critical patent/JPH03164410A/ja
Publication of JPH03164410A publication Critical patent/JPH03164410A/ja
Publication of JPH0525801B2 publication Critical patent/JPH0525801B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP2203036A 1990-07-30 1990-07-30 高濃度アルゴンの製造方法 Granted JPH03164410A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2203036A JPH03164410A (ja) 1990-07-30 1990-07-30 高濃度アルゴンの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2203036A JPH03164410A (ja) 1990-07-30 1990-07-30 高濃度アルゴンの製造方法

Publications (2)

Publication Number Publication Date
JPH03164410A true JPH03164410A (ja) 1991-07-16
JPH0525801B2 JPH0525801B2 (enrdf_load_stackoverflow) 1993-04-14

Family

ID=16467289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2203036A Granted JPH03164410A (ja) 1990-07-30 1990-07-30 高濃度アルゴンの製造方法

Country Status (1)

Country Link
JP (1) JPH03164410A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08165104A (ja) * 1994-12-09 1996-06-25 Kanebo Ltd 高純度酸素ガスの分離法
US5601634A (en) * 1993-09-30 1997-02-11 The Boc Group, Inc. Purification of fluids by adsorption
KR20020051314A (ko) * 2000-12-22 2002-06-29 이구택 활성탄을 이용한 고순도 아르곤가스 정제방법
JP2011184287A (ja) * 2010-02-10 2011-09-22 Sumitomo Seika Chem Co Ltd アルゴンガスの精製方法および精製装置
JP2011195434A (ja) * 2010-02-25 2011-10-06 Sumitomo Seika Chem Co Ltd アルゴンガスの精製方法および精製装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252181A (en) * 1975-07-17 1977-04-26 Boc Ltd Method and apparatus for separating gaseous mixtures
JPS52122273A (en) * 1976-02-27 1977-10-14 Boc Ltd Method and apparatus for increasing ratio of ingredient gas
JPS58167411A (ja) * 1982-03-25 1983-10-03 Nippon Sanso Kk アルゴンの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252181A (en) * 1975-07-17 1977-04-26 Boc Ltd Method and apparatus for separating gaseous mixtures
JPS52122273A (en) * 1976-02-27 1977-10-14 Boc Ltd Method and apparatus for increasing ratio of ingredient gas
JPS58167411A (ja) * 1982-03-25 1983-10-03 Nippon Sanso Kk アルゴンの製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5601634A (en) * 1993-09-30 1997-02-11 The Boc Group, Inc. Purification of fluids by adsorption
JPH08165104A (ja) * 1994-12-09 1996-06-25 Kanebo Ltd 高純度酸素ガスの分離法
KR20020051314A (ko) * 2000-12-22 2002-06-29 이구택 활성탄을 이용한 고순도 아르곤가스 정제방법
JP2011184287A (ja) * 2010-02-10 2011-09-22 Sumitomo Seika Chem Co Ltd アルゴンガスの精製方法および精製装置
JP2011195434A (ja) * 2010-02-25 2011-10-06 Sumitomo Seika Chem Co Ltd アルゴンガスの精製方法および精製装置

Also Published As

Publication number Publication date
JPH0525801B2 (enrdf_load_stackoverflow) 1993-04-14

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