JPH05254023A - Laminating method of photosensitive film - Google Patents
Laminating method of photosensitive filmInfo
- Publication number
- JPH05254023A JPH05254023A JP4055697A JP5569792A JPH05254023A JP H05254023 A JPH05254023 A JP H05254023A JP 4055697 A JP4055697 A JP 4055697A JP 5569792 A JP5569792 A JP 5569792A JP H05254023 A JPH05254023 A JP H05254023A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- photosensitive film
- photosensitive
- photosensitive layer
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Lining Or Joining Of Plastics Or The Like (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、基板上に感光性フィル
ムを積層する方法に関する。FIELD OF THE INVENTION The present invention relates to a method for laminating a photosensitive film on a substrate.
【0002】[0002]
【従来の技術】プリント配線板を製造する場合、エッチ
ングレジスト、メッキレジスト、ソルダーレジストとし
て感光性フィルム(ドライフィルムレジスト)が使用さ
れている。この感光性フィルムを基板上へ積層する方法
としては、エッチングレジスト、メッキレジストでは、
使用する基板表面が比較的平滑であることから、常圧下
で、加熱ゴムロールを用いる方法が多く利用されてい
る。しかしながら、ソルダーレジストのように適用され
る基板が絶縁基体上に導体パターンを有しており、大き
な凹凸を有している場合には、常圧下で加熱ゴムロール
によるラミネートでは、基板と感光性フィルムの間に空
隙が残ってしまうという重大な欠陥が発生する。2. Description of the Related Art In manufacturing a printed wiring board, a photosensitive film (dry film resist) is used as an etching resist, a plating resist and a solder resist. As a method of laminating this photosensitive film on a substrate, etching resist, plating resist,
Since the surface of the substrate used is relatively smooth, a method using a heated rubber roll under normal pressure is often used. However, when a substrate applied like a solder resist has a conductor pattern on an insulating substrate and has large irregularities, when laminating with a heating rubber roll under normal pressure, the substrate and the photosensitive film are A serious defect occurs that voids remain between them.
【0003】このための解決方法として、減圧下で感光
性フィルムを基板上に積層させる方法、すなわち、真空
ラミネート法がすでに公知である。As a solution to this, a method of laminating a photosensitive film on a substrate under a reduced pressure, that is, a vacuum laminating method is already known.
【0004】[0004]
【発明が解決しようとする課題】しかし、上記真空ラミ
ネート法を用いた場合においても、特に基板表面の導体
の高さに比べ感光性フィルムの厚みが小さいような場合
には、感光性フィルムは基板表面の凹凸に完全には密着
せず、場所により空隙が残って欠陥となる。本発明は、
以上の問題点を解決し、基板表面の凹凸に対し、感光性
フィルムの追従性を向上せしめることができ、空隙が残
らない積層方法を提供することにある。However, even when the above-mentioned vacuum laminating method is used, the photosensitive film is not suitable for the substrate especially when the thickness of the photosensitive film is smaller than the height of the conductor on the substrate surface. It does not completely adhere to the surface irregularities, leaving voids depending on the location, resulting in defects. The present invention is
It is an object of the present invention to solve the above problems and to provide a laminating method capable of improving the followability of a photosensitive film with respect to irregularities on the substrate surface and leaving no voids.
【0005】[0005]
【課題を解決するための手段】本発明は、可撓性支持フ
ィルム上に感光層を形成した感光性フィルムを、絶縁基
板上に導体パターンを形成した基板に、感光層が導体パ
ターンを有する面に重なるように減圧下で加熱積層した
後、さらに常圧下で50℃以上で加熱することを特徴と
する感光性フィルムの積層方法である。According to the present invention, a photosensitive film having a photosensitive layer formed on a flexible support film is formed on a substrate having a conductor pattern formed on an insulating substrate, and the photosensitive layer has a surface having the conductor pattern. The method for laminating a photosensitive film is characterized by heating and laminating under reduced pressure so as to overlap with, and then heating at 50 ° C. or higher under normal pressure.
【0006】以下、本発明を詳しく説明する。本発明の
積層方法は、具体的には公知の真空ラミネート法によ
り、基板上に感光性フィルムを積層したのち、このもの
をさらに大気圧下で50℃以上の温度雰囲気下に放置す
るものである。加熱温度は50℃以上、好ましくは60
〜100℃程度とされ、加熱時間は1〜15分間、好ま
しくは3〜10分間程度で十分である。The present invention will be described in detail below. Specifically, the laminating method of the present invention comprises laminating a photosensitive film on a substrate by a known vacuum laminating method and then leaving this film under atmospheric pressure at a temperature of 50 ° C. or higher. .. The heating temperature is 50 ° C or higher, preferably 60
The heating time is about 1 to 15 minutes, preferably about 3 to 10 minutes.
【0007】加熱手段としては、オーブン、赤外線、遠
赤外線、熱ローラー、熱板等があるが、オーブン、赤外
線又は遠赤外線が好ましい。熱ローラー、熱板では基板
の表面の凸部には熱がよく伝わるが、凹部にはローラー
の面、熱板の面が密着しない為、熱の伝わりかたが、不
均一になり、感光層の埋め込み性が不良となりやすいた
めである。As the heating means, there are an oven, infrared rays, far infrared rays, a heat roller, a hot plate and the like, but ovens, infrared rays or far infrared rays are preferable. With a heat roller or heat plate, heat is well transferred to the protrusions on the surface of the substrate, but because the surface of the roller and the surface of the heat plate do not adhere to the recesses, the heat is transferred unevenly This is because the embedding property of is likely to be poor.
【0008】なお、加熱放置による効果の発現機構の詳
細については明らかではないが、常圧下で50℃以上の
温度で加熱すると、減圧下で加熱積層した(真空ラミネ
ート)段階において、基板表面の凹部と、感光性フィル
ムの間に残留した減圧状態にある空隙部に、加熱されて
流動性の向上した感光性フィルムの感光層が引き込まれ
て行くことによるものと考えられる。Although the details of the mechanism by which the effect of heating and leaving is left unclear, it is not clear that when heated at a temperature of 50 ° C. or higher under normal pressure, the concave portions on the surface of the substrate are heated and laminated under reduced pressure (vacuum lamination). It is considered that this is because the photosensitive layer of the photosensitive film, which has been heated and has improved fluidity, is drawn into the voids in a reduced pressure state that remain between the photosensitive films.
【0009】本発明の積層方法は、絶縁基体上に形成さ
れた導体の高さが10μm以上の場合に特に有利であ
り、又、積層前の感光層の厚みが導体高さの1.5倍よ
り小さな場合にも特に有利である。The lamination method of the present invention is particularly advantageous when the height of the conductor formed on the insulating substrate is 10 μm or more, and the thickness of the photosensitive layer before lamination is 1.5 times the conductor height. The smaller case is also particularly advantageous.
【0010】[0010]
【実施例】以下、実施例に基づいて説明する。 (実施例1)表面に、高さ45μmの銅の導体パターン
部を有する厚さ0.8mmガラスエポキシ製基板に、2
5μm厚のポリエステル(PET)フィルム上に下記組
成の感光層を38μm厚で形成した感光性フィルムを、
感光層と基板が重なるように、下記の条件にて、減圧下
積層させた(真空ラミネート)。さらにその直後に80
℃の熱風乾燥機中に5分間放置した後、取り出し、室温
まで冷却した。この基板表面を、拡大鏡にて詳細に観察
したところ、基板と感光性フィルムとの間に空隙の存在
は認められなかった。EXAMPLES Hereinafter, examples will be described. (Example 1) A 0.8 mm-thick glass epoxy substrate having a copper conductor pattern portion having a height of 45 μm on its surface
A photosensitive film comprising a 5 μm thick polyester (PET) film and a 38 μm thick photosensitive layer having the following composition:
The photosensitive layer and the substrate were laminated under reduced pressure under the following conditions (vacuum lamination) so that they overlap each other. 80 immediately after that
After leaving it in a hot air dryer at ℃ for 5 minutes, it was taken out and cooled to room temperature. When the surface of the substrate was observed in detail with a magnifying glass, no void was observed between the substrate and the photosensitive film.
【0011】 積層条件 ・日立エーアイシ(株)製真空ラミネータ HLM−570V ・基板の予熱 80℃ ・基板予熱ロール温度 110℃ ・ヒートシュー温度 100℃ ・ラミネートロールのエアーシリンダ圧 4.5kg/cm2 ・真空チャンバー内の圧力 10mmHg ・ラミネート速度 0.8m/minLaminating conditions-Vacuum laminator HLM-570V manufactured by Hitachi Aishi Co., Ltd.-Preheating of substrate 80 ° C-Preheating substrate temperature 110 ° C-Heat shoe temperature 100 ° C-Air cylinder pressure of laminating roll 4.5 kg / cm 2 Pressure in vacuum chamber 10mmHg ・ Laminating speed 0.8m / min
【0012】 感光層の組成 ・メチルメタクリレート/スチレン/ブチルアクリレート/メタクリル酸 (56/5/15/24重量比)コポリマー 55重量部 ・トリメチロールプロパントリス(エトキシアクリレート) 25重量部 ・テトラプロピレングリコールジアクリレート 10重量部 ・2,4,6トリブロモフェノキシエチルアクリレート 10重量部 ・ベンゾフェノン 4.8重量部 ・ミヒラーズケトン 0.2重量部 ・塩素化銅フタロシアニン 0.25重量部 ・5−アミノ−1H−テトラゾール 0.25重量部 ・ハイドロキノンモノメチルエーテル 0.04重量部Composition of photosensitive layer: 55 parts by weight of methyl methacrylate / styrene / butyl acrylate / methacrylic acid (56/5/15/24 weight ratio) copolymer; 25 parts by weight of trimethylolpropane tris (ethoxyacrylate); tetrapropylene glycol di Acrylate 10 parts by weight-2,4,6-tribromophenoxyethyl acrylate 10 parts by weight-Benzophenone 4.8 parts by weight-Michler's ketone 0.2 parts by weight-Chlorinated copper phthalocyanine 0.25 parts by weight-5-Amino-1H-tetrazole 0.25 parts by weight ・ Hydroquinone monomethyl ether 0.04 parts by weight
【0013】(比較例1)実施例1において、80℃の
熱風乾燥機中への5分間の放置を行なわず、真空ラミネ
ートしたものをそのまま室温まで冷却させた。この基板
表面を拡大鏡にて詳細に観察したところ、基板表面の凹
部(導体の存在しない部分)に多数の空隙が認められ
た。(Comparative Example 1) In Example 1, the vacuum laminated product was allowed to cool to room temperature without being left in a hot air dryer at 80 ° C for 5 minutes. When the surface of the substrate was observed in detail with a magnifying glass, a large number of voids were found in the concave portions (portions where the conductor did not exist) on the surface of the substrate.
【0014】[0014]
【発明の効果】以上のように、本発明の積層方法は、可
撓性支持フィルム上に感光層を形成した感光性フィルム
を、絶縁基体上に導体パターンを形成した基板に、感光
層が導体パターンを有する面に重なるように減圧下で加
熱積層した後、さらに常圧下で50℃以上で加熱するも
のであるので、常圧下で50℃以上の温度で加熱するこ
とにより、凹凸を有する基板上に比較的薄い感光層を有
する感光性フィルムを空隙を残すことなく、完全に密着
させた状態で容易に積層させることができる。As described above, according to the laminating method of the present invention, a photosensitive film having a photosensitive layer formed on a flexible supporting film is formed on a substrate having a conductive pattern formed on an insulating substrate, and the photosensitive layer is formed on the conductive layer. After heating and stacking under reduced pressure so as to overlap the surface having the pattern, it is further heated at 50 ° C. or higher under normal pressure. A photosensitive film having a relatively thin photosensitive layer can be easily laminated in a completely adhered state without leaving voids.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 // B29L 9:00 4F 31:34 4F (72)発明者 酒井 陽一 神奈川県川崎市多摩区登戸3816番地 菱光 電子工業株式会社内─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification number Reference number in the agency FI Technical display location // B29L 9:00 4F 31:34 4F (72) Inventor Yoichi Sakai Noboto Tama-ku, Kawasaki City, Kanagawa Prefecture 3816 Address Ryoko Electronic Industry Co., Ltd.
Claims (1)
た感光性フィルムを、絶縁基体上に導体パターンを形成
した基板に、感光層が導体パターンを有する面に重なる
ように減圧下で加熱積層した後、さらに常圧下で50℃
以上で加熱することを特徴とする感光性フィルムの積層
方法。1. A photosensitive film having a photosensitive layer formed on a flexible support film is heated under reduced pressure on a substrate having a conductive pattern formed on an insulating substrate so that the photosensitive layer overlaps the surface having the conductive pattern. After stacking, further at normal pressure 50 ℃
A method for laminating a photosensitive film, which comprises heating as described above.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4055697A JPH05254023A (en) | 1992-03-13 | 1992-03-13 | Laminating method of photosensitive film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4055697A JPH05254023A (en) | 1992-03-13 | 1992-03-13 | Laminating method of photosensitive film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05254023A true JPH05254023A (en) | 1993-10-05 |
Family
ID=13006089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4055697A Withdrawn JPH05254023A (en) | 1992-03-13 | 1992-03-13 | Laminating method of photosensitive film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05254023A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160212862A1 (en) * | 2013-07-11 | 2016-07-21 | Hsio Technologies, Llc | Fusion bonded liquid crystal polymer electrical circuit structure |
JP2018110240A (en) * | 2018-01-30 | 2018-07-12 | 大日本印刷株式会社 | Lamination method of resist film |
US10667410B2 (en) | 2013-07-11 | 2020-05-26 | Hsio Technologies, Llc | Method of making a fusion bonded circuit structure |
JP2020120325A (en) * | 2019-01-25 | 2020-08-06 | 株式会社アルバック | Manufacturing method of ultrasonic probe, and ultrasonic probe |
-
1992
- 1992-03-13 JP JP4055697A patent/JPH05254023A/en not_active Withdrawn
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160212862A1 (en) * | 2013-07-11 | 2016-07-21 | Hsio Technologies, Llc | Fusion bonded liquid crystal polymer electrical circuit structure |
US10506722B2 (en) * | 2013-07-11 | 2019-12-10 | Hsio Technologies, Llc | Fusion bonded liquid crystal polymer electrical circuit structure |
US10667410B2 (en) | 2013-07-11 | 2020-05-26 | Hsio Technologies, Llc | Method of making a fusion bonded circuit structure |
JP2018110240A (en) * | 2018-01-30 | 2018-07-12 | 大日本印刷株式会社 | Lamination method of resist film |
JP2020120325A (en) * | 2019-01-25 | 2020-08-06 | 株式会社アルバック | Manufacturing method of ultrasonic probe, and ultrasonic probe |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990518 |