JPH0525290B2 - - Google Patents

Info

Publication number
JPH0525290B2
JPH0525290B2 JP62295635A JP29563587A JPH0525290B2 JP H0525290 B2 JPH0525290 B2 JP H0525290B2 JP 62295635 A JP62295635 A JP 62295635A JP 29563587 A JP29563587 A JP 29563587A JP H0525290 B2 JPH0525290 B2 JP H0525290B2
Authority
JP
Japan
Prior art keywords
pyroelectric
groove
spacer
substrate
support film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62295635A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01136035A (ja
Inventor
Akimasa Tanaka
Akinaga Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP62295635A priority Critical patent/JPH01136035A/ja
Publication of JPH01136035A publication Critical patent/JPH01136035A/ja
Publication of JPH0525290B2 publication Critical patent/JPH0525290B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
JP62295635A 1987-11-24 1987-11-24 焦電型検出素子の製造方法 Granted JPH01136035A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62295635A JPH01136035A (ja) 1987-11-24 1987-11-24 焦電型検出素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62295635A JPH01136035A (ja) 1987-11-24 1987-11-24 焦電型検出素子の製造方法

Publications (2)

Publication Number Publication Date
JPH01136035A JPH01136035A (ja) 1989-05-29
JPH0525290B2 true JPH0525290B2 (enrdf_load_stackoverflow) 1993-04-12

Family

ID=17823199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62295635A Granted JPH01136035A (ja) 1987-11-24 1987-11-24 焦電型検出素子の製造方法

Country Status (1)

Country Link
JP (1) JPH01136035A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015087318A (ja) * 2013-10-31 2015-05-07 浜松ホトニクス株式会社 光検出装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5450053A (en) * 1985-09-30 1995-09-12 Honeywell Inc. Use of vanadium oxide in microbolometer sensors
US5300915A (en) * 1986-07-16 1994-04-05 Honeywell Inc. Thermal sensor
US5286976A (en) * 1988-11-07 1994-02-15 Honeywell Inc. Microstructure design for high IR sensitivity
JPH04132271A (ja) * 1990-09-21 1992-05-06 Hamamatsu Photonics Kk 赤外線センサ
US5413667A (en) * 1992-11-04 1995-05-09 Matsushita Electric Industrial Co., Ltd. Pyroelectric infrared detector fabricating method
US5471060A (en) * 1993-08-23 1995-11-28 Matsushita Electric Industrial Co., Ltd. Pyroelectric infrared radiation detector and method of producing the same
JP5002815B2 (ja) * 2005-06-04 2012-08-15 国立大学法人豊橋技術科学大学 集積装置とその製造方法
DE102009037111B4 (de) * 2009-08-11 2011-07-21 Pyreos Ltd. Kompakter Infrarotlichtdetektor und Verfahren zur Herstellung desselben
EP3015833B1 (en) * 2014-10-31 2020-01-22 Emberion Oy A sensing apparatus
GB201816609D0 (en) 2018-10-11 2018-11-28 Emberion Oy Multispectral photodetector array

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932828A (ja) * 1982-08-18 1984-02-22 Matsushita Electric Ind Co Ltd 赤外線検出素子

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015087318A (ja) * 2013-10-31 2015-05-07 浜松ホトニクス株式会社 光検出装置
WO2015064750A1 (ja) * 2013-10-31 2015-05-07 浜松ホトニクス株式会社 光検出装置
US10066995B2 (en) 2013-10-31 2018-09-04 Hamamatsu Photonics K.K. Light-detecting device
US10775238B2 (en) 2013-10-31 2020-09-15 Hamamatsu Photonics K.K. Light-detecting device
US10895501B2 (en) 2013-10-31 2021-01-19 Hamamatsu Photonics K.K. Light-detecting device

Also Published As

Publication number Publication date
JPH01136035A (ja) 1989-05-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees