JPH0523584Y2 - - Google Patents
Info
- Publication number
- JPH0523584Y2 JPH0523584Y2 JP14532987U JP14532987U JPH0523584Y2 JP H0523584 Y2 JPH0523584 Y2 JP H0523584Y2 JP 14532987 U JP14532987 U JP 14532987U JP 14532987 U JP14532987 U JP 14532987U JP H0523584 Y2 JPH0523584 Y2 JP H0523584Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- jig
- holder
- claws
- legs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 41
- 210000000078 claw Anatomy 0.000 claims description 17
- 239000013078 crystal Substances 0.000 claims description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- 238000000034 method Methods 0.000 description 4
- 239000002223 garnet Substances 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- JUWSSMXCCAMYGX-UHFFFAOYSA-N gold platinum Chemical compound [Pt].[Au] JUWSSMXCCAMYGX-UHFFFAOYSA-N 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14532987U JPH0523584Y2 (enExample) | 1987-09-25 | 1987-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14532987U JPH0523584Y2 (enExample) | 1987-09-25 | 1987-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6451669U JPS6451669U (enExample) | 1989-03-30 |
| JPH0523584Y2 true JPH0523584Y2 (enExample) | 1993-06-16 |
Family
ID=31413817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14532987U Expired - Lifetime JPH0523584Y2 (enExample) | 1987-09-25 | 1987-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523584Y2 (enExample) |
-
1987
- 1987-09-25 JP JP14532987U patent/JPH0523584Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6451669U (enExample) | 1989-03-30 |
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