JPS6451669U - - Google Patents
Info
- Publication number
- JPS6451669U JPS6451669U JP14532987U JP14532987U JPS6451669U JP S6451669 U JPS6451669 U JP S6451669U JP 14532987 U JP14532987 U JP 14532987U JP 14532987 U JP14532987 U JP 14532987U JP S6451669 U JPS6451669 U JP S6451669U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- claws
- jig
- legs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 210000000078 claw Anatomy 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14532987U JPH0523584Y2 (enExample) | 1987-09-25 | 1987-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14532987U JPH0523584Y2 (enExample) | 1987-09-25 | 1987-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6451669U true JPS6451669U (enExample) | 1989-03-30 |
| JPH0523584Y2 JPH0523584Y2 (enExample) | 1993-06-16 |
Family
ID=31413817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14532987U Expired - Lifetime JPH0523584Y2 (enExample) | 1987-09-25 | 1987-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523584Y2 (enExample) |
-
1987
- 1987-09-25 JP JP14532987U patent/JPH0523584Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523584Y2 (enExample) | 1993-06-16 |
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