JPH0523566Y2 - - Google Patents

Info

Publication number
JPH0523566Y2
JPH0523566Y2 JP11025587U JP11025587U JPH0523566Y2 JP H0523566 Y2 JPH0523566 Y2 JP H0523566Y2 JP 11025587 U JP11025587 U JP 11025587U JP 11025587 U JP11025587 U JP 11025587U JP H0523566 Y2 JPH0523566 Y2 JP H0523566Y2
Authority
JP
Japan
Prior art keywords
substrate
vacuum chamber
ion plating
evaporation
plating apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11025587U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6414159U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11025587U priority Critical patent/JPH0523566Y2/ja
Publication of JPS6414159U publication Critical patent/JPS6414159U/ja
Application granted granted Critical
Publication of JPH0523566Y2 publication Critical patent/JPH0523566Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Physical Vapour Deposition (AREA)
JP11025587U 1987-07-17 1987-07-17 Expired - Lifetime JPH0523566Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11025587U JPH0523566Y2 (enrdf_load_stackoverflow) 1987-07-17 1987-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11025587U JPH0523566Y2 (enrdf_load_stackoverflow) 1987-07-17 1987-07-17

Publications (2)

Publication Number Publication Date
JPS6414159U JPS6414159U (enrdf_load_stackoverflow) 1989-01-25
JPH0523566Y2 true JPH0523566Y2 (enrdf_load_stackoverflow) 1993-06-16

Family

ID=31347248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11025587U Expired - Lifetime JPH0523566Y2 (enrdf_load_stackoverflow) 1987-07-17 1987-07-17

Country Status (1)

Country Link
JP (1) JPH0523566Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6414159U (enrdf_load_stackoverflow) 1989-01-25

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