JPH0523501B2 - - Google Patents

Info

Publication number
JPH0523501B2
JPH0523501B2 JP61150974A JP15097486A JPH0523501B2 JP H0523501 B2 JPH0523501 B2 JP H0523501B2 JP 61150974 A JP61150974 A JP 61150974A JP 15097486 A JP15097486 A JP 15097486A JP H0523501 B2 JPH0523501 B2 JP H0523501B2
Authority
JP
Japan
Prior art keywords
pattern
scanning
drawn
area
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61150974A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63100362A (ja
Inventor
Yoichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP61150974A priority Critical patent/JPS63100362A/ja
Publication of JPS63100362A publication Critical patent/JPS63100362A/ja
Publication of JPH0523501B2 publication Critical patent/JPH0523501B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP61150974A 1986-06-27 1986-06-27 材料検査方法 Granted JPS63100362A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61150974A JPS63100362A (ja) 1986-06-27 1986-06-27 材料検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61150974A JPS63100362A (ja) 1986-06-27 1986-06-27 材料検査方法

Publications (2)

Publication Number Publication Date
JPS63100362A JPS63100362A (ja) 1988-05-02
JPH0523501B2 true JPH0523501B2 (cs) 1993-04-02

Family

ID=15508514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61150974A Granted JPS63100362A (ja) 1986-06-27 1986-06-27 材料検査方法

Country Status (1)

Country Link
JP (1) JPS63100362A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02204954A (ja) * 1989-02-01 1990-08-14 Nippon Telegr & Teleph Corp <Ntt> 走査型透過電子顕微鏡法
KR102803067B1 (ko) * 2021-06-04 2025-05-07 주식회사 히타치하이테크 시료상 관찰 장치 및 방법

Also Published As

Publication number Publication date
JPS63100362A (ja) 1988-05-02

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