JPH0523084B2 - - Google Patents
Info
- Publication number
- JPH0523084B2 JPH0523084B2 JP59046993A JP4699384A JPH0523084B2 JP H0523084 B2 JPH0523084 B2 JP H0523084B2 JP 59046993 A JP59046993 A JP 59046993A JP 4699384 A JP4699384 A JP 4699384A JP H0523084 B2 JPH0523084 B2 JP H0523084B2
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- sintered body
- acoustic wave
- surface acoustic
- nitride sintered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4699384A JPS60192410A (ja) | 1984-03-14 | 1984-03-14 | 弾性表面波素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4699384A JPS60192410A (ja) | 1984-03-14 | 1984-03-14 | 弾性表面波素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60192410A JPS60192410A (ja) | 1985-09-30 |
JPH0523084B2 true JPH0523084B2 (enrdf_load_stackoverflow) | 1993-03-31 |
Family
ID=12762717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4699384A Granted JPS60192410A (ja) | 1984-03-14 | 1984-03-14 | 弾性表面波素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60192410A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02248110A (ja) * | 1989-03-20 | 1990-10-03 | Sanyo Electric Co Ltd | 弾性表面波素子 |
JPH08130439A (ja) * | 1994-11-01 | 1996-05-21 | Agency Of Ind Science & Technol | 高速表面弾性波素子 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5631213A (en) * | 1979-08-24 | 1981-03-30 | Matsushita Electric Ind Co Ltd | Surface elastic wave element |
-
1984
- 1984-03-14 JP JP4699384A patent/JPS60192410A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60192410A (ja) | 1985-09-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2058075C (en) | Composite ceramic powder and production process thereof | |
GB1582317A (en) | Piezoelectric crystalline films | |
WO1983003094A1 (en) | Oxide-containing magnetic material capable of being sintered at low temperatures | |
US4915737A (en) | Alloy target for manufacturing a magneto-optical recording medium | |
JPH0523084B2 (enrdf_load_stackoverflow) | ||
JPH06216699A (ja) | 酸化亜鉛圧電結晶膜 | |
JP3366938B2 (ja) | ジルコン酸カルシウム/マグネシア系複合多孔体およびその製造方法 | |
JPH0333066A (ja) | 窒化アルミニウム構造物の製造方法 | |
JP2002338354A (ja) | 酸化ニオブ焼結体とその製造方法及びこれを用いたスパッタリングターゲット | |
JPS5831743B2 (ja) | 酸化亜鉛の圧電結晶膜 | |
US4915738A (en) | Alloy target for manufacturing a magneto-optical recording medium | |
JPS5830752B2 (ja) | 酸化亜鉛の圧電結晶膜 | |
Kumta et al. | Chemical processing of rare earth chalcogenides | |
JP2984581B2 (ja) | インジウム−スズ酸化物からなる部材およびその製造法 | |
WO2022186072A1 (ja) | コーディエライト質焼結体およびその製造方法 | |
CN113024249A (zh) | 微波介质陶瓷复合材料及制备方法 | |
US4151324A (en) | Piezoelectric crystalline films and method of preparing the same | |
JPS6360106A (ja) | スピネル粉体およびその製造方法 | |
JPH0320468B2 (enrdf_load_stackoverflow) | ||
JP4918737B2 (ja) | 酸化物焼結体およびスパッタリングターゲット | |
US4156050A (en) | Piezoelectric crystalline films and method of preparing the same | |
JP2001295037A (ja) | スパッタターゲット | |
JPH09143703A (ja) | 光記録保護膜形成用スパッタリングターゲット | |
JP4717247B2 (ja) | スパッタリング用ターゲット及びその製造方法 | |
JP3368764B2 (ja) | パーティクル発生の少ない光記録保護膜形成用スパッタリングターゲット |