JPH0521981B2 - - Google Patents
Info
- Publication number
- JPH0521981B2 JPH0521981B2 JP27111385A JP27111385A JPH0521981B2 JP H0521981 B2 JPH0521981 B2 JP H0521981B2 JP 27111385 A JP27111385 A JP 27111385A JP 27111385 A JP27111385 A JP 27111385A JP H0521981 B2 JPH0521981 B2 JP H0521981B2
- Authority
- JP
- Japan
- Prior art keywords
- radiation
- ring
- vacuum
- vacuum chamber
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005855 radiation Effects 0.000 claims description 43
- 239000010409 thin film Substances 0.000 claims description 8
- 239000010408 film Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 description 7
- 239000011651 chromium Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27111385A JPS62130275A (ja) | 1985-12-02 | 1985-12-02 | 放射線導入窓 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27111385A JPS62130275A (ja) | 1985-12-02 | 1985-12-02 | 放射線導入窓 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62130275A JPS62130275A (ja) | 1987-06-12 |
| JPH0521981B2 true JPH0521981B2 (de) | 1993-03-26 |
Family
ID=17495515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27111385A Granted JPS62130275A (ja) | 1985-12-02 | 1985-12-02 | 放射線導入窓 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62130275A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10322585B4 (de) * | 2003-05-20 | 2018-12-06 | Hydac Fluidtechnik Gmbh | Ventilbaukastensysteme |
| JP6625891B2 (ja) | 2016-02-10 | 2019-12-25 | 株式会社日立ハイテクノロジーズ | 真空処理装置 |
| JP6825069B2 (ja) * | 2019-11-28 | 2021-02-03 | 株式会社日立ハイテク | 真空処理装置 |
-
1985
- 1985-12-02 JP JP27111385A patent/JPS62130275A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62130275A (ja) | 1987-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |