JPH0521875Y2 - - Google Patents
Info
- Publication number
- JPH0521875Y2 JPH0521875Y2 JP1986090785U JP9078586U JPH0521875Y2 JP H0521875 Y2 JPH0521875 Y2 JP H0521875Y2 JP 1986090785 U JP1986090785 U JP 1986090785U JP 9078586 U JP9078586 U JP 9078586U JP H0521875 Y2 JPH0521875 Y2 JP H0521875Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pin
- pins
- heater section
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 16
- 235000012431 wafers Nutrition 0.000 description 60
- 239000000428 dust Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986090785U JPH0521875Y2 (US06650917-20031118-M00005.png) | 1986-06-14 | 1986-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986090785U JPH0521875Y2 (US06650917-20031118-M00005.png) | 1986-06-14 | 1986-06-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62201932U JPS62201932U (US06650917-20031118-M00005.png) | 1987-12-23 |
| JPH0521875Y2 true JPH0521875Y2 (US06650917-20031118-M00005.png) | 1993-06-04 |
Family
ID=30950968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986090785U Expired - Lifetime JPH0521875Y2 (US06650917-20031118-M00005.png) | 1986-06-14 | 1986-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521875Y2 (US06650917-20031118-M00005.png) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5737848A (en) * | 1980-08-19 | 1982-03-02 | Toshiba Corp | Heating apparatus for wafer |
| JPS5749248A (en) * | 1980-09-09 | 1982-03-23 | Fujitsu Ltd | Substrate heating and retaining device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6176957U (US06650917-20031118-M00005.png) * | 1984-10-26 | 1986-05-23 |
-
1986
- 1986-06-14 JP JP1986090785U patent/JPH0521875Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5737848A (en) * | 1980-08-19 | 1982-03-02 | Toshiba Corp | Heating apparatus for wafer |
| JPS5749248A (en) * | 1980-09-09 | 1982-03-23 | Fujitsu Ltd | Substrate heating and retaining device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62201932U (US06650917-20031118-M00005.png) | 1987-12-23 |
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