JPH0521868Y2 - - Google Patents

Info

Publication number
JPH0521868Y2
JPH0521868Y2 JP13928087U JP13928087U JPH0521868Y2 JP H0521868 Y2 JPH0521868 Y2 JP H0521868Y2 JP 13928087 U JP13928087 U JP 13928087U JP 13928087 U JP13928087 U JP 13928087U JP H0521868 Y2 JPH0521868 Y2 JP H0521868Y2
Authority
JP
Japan
Prior art keywords
film
substrate
forming mask
mask
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13928087U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6444626U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13928087U priority Critical patent/JPH0521868Y2/ja
Publication of JPS6444626U publication Critical patent/JPS6444626U/ja
Application granted granted Critical
Publication of JPH0521868Y2 publication Critical patent/JPH0521868Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP13928087U 1987-09-11 1987-09-11 Expired - Lifetime JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13928087U JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-11 1987-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13928087U JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-11 1987-09-11

Publications (2)

Publication Number Publication Date
JPS6444626U JPS6444626U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-16
JPH0521868Y2 true JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-06-04

Family

ID=31402391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13928087U Expired - Lifetime JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-11 1987-09-11

Country Status (1)

Country Link
JP (1) JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6444626U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-16

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