JPS6444626U - - Google Patents

Info

Publication number
JPS6444626U
JPS6444626U JP13928087U JP13928087U JPS6444626U JP S6444626 U JPS6444626 U JP S6444626U JP 13928087 U JP13928087 U JP 13928087U JP 13928087 U JP13928087 U JP 13928087U JP S6444626 U JPS6444626 U JP S6444626U
Authority
JP
Japan
Prior art keywords
tray
forming mask
substrate
film
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13928087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13928087U priority Critical patent/JPH0521868Y2/ja
Publication of JPS6444626U publication Critical patent/JPS6444626U/ja
Application granted granted Critical
Publication of JPH0521868Y2 publication Critical patent/JPH0521868Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP13928087U 1987-09-11 1987-09-11 Expired - Lifetime JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13928087U JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-11 1987-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13928087U JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-11 1987-09-11

Publications (2)

Publication Number Publication Date
JPS6444626U true JPS6444626U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-16
JPH0521868Y2 JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-06-04

Family

ID=31402391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13928087U Expired - Lifetime JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-11 1987-09-11

Country Status (1)

Country Link
JP (1) JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0521868Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-06-04

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