JPH0521501B2 - - Google Patents
Info
- Publication number
- JPH0521501B2 JPH0521501B2 JP61173575A JP17357586A JPH0521501B2 JP H0521501 B2 JPH0521501 B2 JP H0521501B2 JP 61173575 A JP61173575 A JP 61173575A JP 17357586 A JP17357586 A JP 17357586A JP H0521501 B2 JPH0521501 B2 JP H0521501B2
- Authority
- JP
- Japan
- Prior art keywords
- light beam
- sample
- light
- photoacoustic signal
- sample surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 62
- 238000001514 detection method Methods 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 18
- 239000000919 ceramic Substances 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61173575A JPS6330758A (ja) | 1986-07-25 | 1986-07-25 | 表面欠陥検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61173575A JPS6330758A (ja) | 1986-07-25 | 1986-07-25 | 表面欠陥検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6330758A JPS6330758A (ja) | 1988-02-09 |
| JPH0521501B2 true JPH0521501B2 (enrdf_load_html_response) | 1993-03-24 |
Family
ID=15963105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61173575A Granted JPS6330758A (ja) | 1986-07-25 | 1986-07-25 | 表面欠陥検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6330758A (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003185639A (ja) * | 2001-12-20 | 2003-07-03 | Toshiba Corp | レーザ超音波検査装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2718705B2 (ja) * | 1988-07-27 | 1998-02-25 | 株式会社日立製作所 | 光音響信号検出方法及びその装置 |
| KR101101988B1 (ko) * | 2009-02-16 | 2012-01-02 | 연세대학교 산학협력단 | 근접 주사 광음향 측정 장치 |
| GB2484673A (en) * | 2010-10-18 | 2012-04-25 | Univ Dublin City | A photoacoustic inspection device |
| GB2503722A (en) * | 2012-07-06 | 2014-01-08 | Sonex Metrology Ltd | A photoacoustic inspection device |
| GB201312046D0 (en) * | 2013-07-04 | 2013-08-21 | Sonex Metrology Ltd | An acoustic isolation chamber |
-
1986
- 1986-07-25 JP JP61173575A patent/JPS6330758A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003185639A (ja) * | 2001-12-20 | 2003-07-03 | Toshiba Corp | レーザ超音波検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6330758A (ja) | 1988-02-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |