JPS6330758A - 表面欠陥検出方法 - Google Patents

表面欠陥検出方法

Info

Publication number
JPS6330758A
JPS6330758A JP61173575A JP17357586A JPS6330758A JP S6330758 A JPS6330758 A JP S6330758A JP 61173575 A JP61173575 A JP 61173575A JP 17357586 A JP17357586 A JP 17357586A JP S6330758 A JPS6330758 A JP S6330758A
Authority
JP
Japan
Prior art keywords
light beam
sample
photoacoustic signal
flaw
sample surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61173575A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521501B2 (enrdf_load_html_response
Inventor
Izumi Tomeno
留野　泉
Hideyuki Ozu
秀行 大図
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61173575A priority Critical patent/JPS6330758A/ja
Publication of JPS6330758A publication Critical patent/JPS6330758A/ja
Publication of JPH0521501B2 publication Critical patent/JPH0521501B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP61173575A 1986-07-25 1986-07-25 表面欠陥検出方法 Granted JPS6330758A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61173575A JPS6330758A (ja) 1986-07-25 1986-07-25 表面欠陥検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61173575A JPS6330758A (ja) 1986-07-25 1986-07-25 表面欠陥検出方法

Publications (2)

Publication Number Publication Date
JPS6330758A true JPS6330758A (ja) 1988-02-09
JPH0521501B2 JPH0521501B2 (enrdf_load_html_response) 1993-03-24

Family

ID=15963105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61173575A Granted JPS6330758A (ja) 1986-07-25 1986-07-25 表面欠陥検出方法

Country Status (1)

Country Link
JP (1) JPS6330758A (enrdf_load_html_response)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0236338A (ja) * 1988-07-27 1990-02-06 Hitachi Ltd 光音響信号検出方法及びその装置
KR101101988B1 (ko) * 2009-02-16 2012-01-02 연세대학교 산학협력단 근접 주사 광음향 측정 장치
GB2484673A (en) * 2010-10-18 2012-04-25 Univ Dublin City A photoacoustic inspection device
GB2503722A (en) * 2012-07-06 2014-01-08 Sonex Metrology Ltd A photoacoustic inspection device
GB2515840A (en) * 2013-07-04 2015-01-07 Sonex Metrology Ltd An acoustic isolation chamber

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4251601B2 (ja) * 2001-12-20 2009-04-08 株式会社東芝 レーザ超音波検査装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0236338A (ja) * 1988-07-27 1990-02-06 Hitachi Ltd 光音響信号検出方法及びその装置
KR101101988B1 (ko) * 2009-02-16 2012-01-02 연세대학교 산학협력단 근접 주사 광음향 측정 장치
GB2484673A (en) * 2010-10-18 2012-04-25 Univ Dublin City A photoacoustic inspection device
GB2503722A (en) * 2012-07-06 2014-01-08 Sonex Metrology Ltd A photoacoustic inspection device
GB2515840A (en) * 2013-07-04 2015-01-07 Sonex Metrology Ltd An acoustic isolation chamber

Also Published As

Publication number Publication date
JPH0521501B2 (enrdf_load_html_response) 1993-03-24

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