JPH0520854B2 - - Google Patents
Info
- Publication number
- JPH0520854B2 JPH0520854B2 JP60060652A JP6065285A JPH0520854B2 JP H0520854 B2 JPH0520854 B2 JP H0520854B2 JP 60060652 A JP60060652 A JP 60060652A JP 6065285 A JP6065285 A JP 6065285A JP H0520854 B2 JPH0520854 B2 JP H0520854B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- cathode
- anode
- vacuum container
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 claims description 28
- 239000007789 gas Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 description 11
- 230000000694 effects Effects 0.000 description 6
- 230000000087 stabilizing effect Effects 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000010891 electric arc Methods 0.000 description 3
- 238000007788 roughening Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60060652A JPS61220262A (ja) | 1985-03-27 | 1985-03-27 | 放電洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60060652A JPS61220262A (ja) | 1985-03-27 | 1985-03-27 | 放電洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61220262A JPS61220262A (ja) | 1986-09-30 |
| JPH0520854B2 true JPH0520854B2 (enrdf_load_html_response) | 1993-03-22 |
Family
ID=13148476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60060652A Granted JPS61220262A (ja) | 1985-03-27 | 1985-03-27 | 放電洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61220262A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01170893A (ja) * | 1987-12-26 | 1989-07-05 | Japan Atom Energy Res Inst | グロー放電装置 |
| JPH04306546A (ja) * | 1991-04-01 | 1992-10-29 | Kokusai Electric Co Ltd | 直流グロー放電洗浄用電極 |
-
1985
- 1985-03-27 JP JP60060652A patent/JPS61220262A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61220262A (ja) | 1986-09-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |