JPS61220262A - 放電洗浄装置 - Google Patents

放電洗浄装置

Info

Publication number
JPS61220262A
JPS61220262A JP60060652A JP6065285A JPS61220262A JP S61220262 A JPS61220262 A JP S61220262A JP 60060652 A JP60060652 A JP 60060652A JP 6065285 A JP6065285 A JP 6065285A JP S61220262 A JPS61220262 A JP S61220262A
Authority
JP
Japan
Prior art keywords
discharge
container
cathode
plasma
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60060652A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0520854B2 (enrdf_load_html_response
Inventor
Takanari Kawabe
河邊　隆也
Akiko Ito
明子 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60060652A priority Critical patent/JPS61220262A/ja
Publication of JPS61220262A publication Critical patent/JPS61220262A/ja
Publication of JPH0520854B2 publication Critical patent/JPH0520854B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP60060652A 1985-03-27 1985-03-27 放電洗浄装置 Granted JPS61220262A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60060652A JPS61220262A (ja) 1985-03-27 1985-03-27 放電洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60060652A JPS61220262A (ja) 1985-03-27 1985-03-27 放電洗浄装置

Publications (2)

Publication Number Publication Date
JPS61220262A true JPS61220262A (ja) 1986-09-30
JPH0520854B2 JPH0520854B2 (enrdf_load_html_response) 1993-03-22

Family

ID=13148476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60060652A Granted JPS61220262A (ja) 1985-03-27 1985-03-27 放電洗浄装置

Country Status (1)

Country Link
JP (1) JPS61220262A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01170893A (ja) * 1987-12-26 1989-07-05 Japan Atom Energy Res Inst グロー放電装置
JPH04306546A (ja) * 1991-04-01 1992-10-29 Kokusai Electric Co Ltd 直流グロー放電洗浄用電極

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01170893A (ja) * 1987-12-26 1989-07-05 Japan Atom Energy Res Inst グロー放電装置
JPH04306546A (ja) * 1991-04-01 1992-10-29 Kokusai Electric Co Ltd 直流グロー放電洗浄用電極

Also Published As

Publication number Publication date
JPH0520854B2 (enrdf_load_html_response) 1993-03-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term