JPH0519938B2 - - Google Patents
Info
- Publication number
- JPH0519938B2 JPH0519938B2 JP60298673A JP29867385A JPH0519938B2 JP H0519938 B2 JPH0519938 B2 JP H0519938B2 JP 60298673 A JP60298673 A JP 60298673A JP 29867385 A JP29867385 A JP 29867385A JP H0519938 B2 JPH0519938 B2 JP H0519938B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- inspected
- defect
- average brightness
- mask image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 238000005286 illumination Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 14
- 238000007689 inspection Methods 0.000 description 5
- 240000007320 Pinus strobus Species 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000003623 enhancer Substances 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29867385A JPS62156547A (ja) | 1985-12-27 | 1985-12-27 | 表面欠陥検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29867385A JPS62156547A (ja) | 1985-12-27 | 1985-12-27 | 表面欠陥検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62156547A JPS62156547A (ja) | 1987-07-11 |
| JPH0519938B2 true JPH0519938B2 (ko) | 1993-03-18 |
Family
ID=17862785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29867385A Granted JPS62156547A (ja) | 1985-12-27 | 1985-12-27 | 表面欠陥検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62156547A (ko) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2737484B2 (ja) * | 1991-10-15 | 1998-04-08 | 松下電器産業株式会社 | 配線パターン検査装置 |
| JP2819916B2 (ja) * | 1991-02-26 | 1998-11-05 | 松下電器産業株式会社 | 配線パターン検査装置 |
| JP2760250B2 (ja) * | 1993-02-03 | 1998-05-28 | 株式会社デンソー | ピンホール検査装置 |
| JP5601984B2 (ja) * | 2010-11-16 | 2014-10-08 | 東洋鋼鈑株式会社 | 多孔板表面検査方法及び多孔板表面検査装置 |
| JP5702990B2 (ja) * | 2010-11-16 | 2015-04-15 | 東洋鋼鈑株式会社 | 板材検査方法及び板材検査装置 |
| JP6526514B2 (ja) * | 2015-07-31 | 2019-06-05 | リコーエレメックス株式会社 | 検査装置、方法及びプログラム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4861030A (ko) * | 1971-12-03 | 1973-08-27 | ||
| JPS50123386A (ko) * | 1974-03-08 | 1975-09-27 |
-
1985
- 1985-12-27 JP JP29867385A patent/JPS62156547A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4861030A (ko) * | 1971-12-03 | 1973-08-27 | ||
| JPS50123386A (ko) * | 1974-03-08 | 1975-09-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62156547A (ja) | 1987-07-11 |
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