JPH0519092B2 - - Google Patents
Info
- Publication number
- JPH0519092B2 JPH0519092B2 JP63130248A JP13024888A JPH0519092B2 JP H0519092 B2 JPH0519092 B2 JP H0519092B2 JP 63130248 A JP63130248 A JP 63130248A JP 13024888 A JP13024888 A JP 13024888A JP H0519092 B2 JPH0519092 B2 JP H0519092B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- valve
- test specimen
- analysis tube
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001514 detection method Methods 0.000 claims description 15
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 30
- 239000001307 helium Substances 0.000 description 28
- 229910052734 helium Inorganic materials 0.000 description 28
- 239000007789 gas Substances 0.000 description 23
- 238000009792 diffusion process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 210000003717 douglas' pouch Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13024888A JPH01301137A (ja) | 1988-05-30 | 1988-05-30 | 急速真空漏れ探査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13024888A JPH01301137A (ja) | 1988-05-30 | 1988-05-30 | 急速真空漏れ探査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01301137A JPH01301137A (ja) | 1989-12-05 |
JPH0519092B2 true JPH0519092B2 (de) | 1993-03-15 |
Family
ID=15029694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13024888A Granted JPH01301137A (ja) | 1988-05-30 | 1988-05-30 | 急速真空漏れ探査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01301137A (de) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4472962A (en) * | 1981-08-03 | 1984-09-25 | Balzers Aktiengesellschaft | Low pressure leak detector |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59152436U (ja) * | 1983-03-30 | 1984-10-12 | 株式会社島津製作所 | リ−クテスト装置 |
JPS6262947U (de) * | 1985-10-12 | 1987-04-18 |
-
1988
- 1988-05-30 JP JP13024888A patent/JPH01301137A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4472962A (en) * | 1981-08-03 | 1984-09-25 | Balzers Aktiengesellschaft | Low pressure leak detector |
Also Published As
Publication number | Publication date |
---|---|
JPH01301137A (ja) | 1989-12-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |