JPH0518252B2 - - Google Patents

Info

Publication number
JPH0518252B2
JPH0518252B2 JP59092811A JP9281184A JPH0518252B2 JP H0518252 B2 JPH0518252 B2 JP H0518252B2 JP 59092811 A JP59092811 A JP 59092811A JP 9281184 A JP9281184 A JP 9281184A JP H0518252 B2 JPH0518252 B2 JP H0518252B2
Authority
JP
Japan
Prior art keywords
gas
photoresist
reaction chamber
plasma
ashing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59092811A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60239027A (ja
Inventor
Takashi Fujii
Masaharu Saikai
Atsushi Kohama
Hitoaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9281184A priority Critical patent/JPS60239027A/ja
Publication of JPS60239027A publication Critical patent/JPS60239027A/ja
Publication of JPH0518252B2 publication Critical patent/JPH0518252B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)
JP9281184A 1984-05-11 1984-05-11 アツシング方法 Granted JPS60239027A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9281184A JPS60239027A (ja) 1984-05-11 1984-05-11 アツシング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9281184A JPS60239027A (ja) 1984-05-11 1984-05-11 アツシング方法

Publications (2)

Publication Number Publication Date
JPS60239027A JPS60239027A (ja) 1985-11-27
JPH0518252B2 true JPH0518252B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-11

Family

ID=14064793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9281184A Granted JPS60239027A (ja) 1984-05-11 1984-05-11 アツシング方法

Country Status (1)

Country Link
JP (1) JPS60239027A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63202918A (ja) * 1987-02-18 1988-08-22 Tokyo Electron Ltd オゾン分解器

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5226274B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-01-25 1977-07-13
JPS5110798A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-07-17 1976-01-28 Citizen Watch Co Ltd
JPS5941835A (ja) * 1982-08-31 1984-03-08 Fujitsu Ltd レジスト剥離方法

Also Published As

Publication number Publication date
JPS60239027A (ja) 1985-11-27

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