JPH051814Y2 - - Google Patents
Info
- Publication number
- JPH051814Y2 JPH051814Y2 JP10691785U JP10691785U JPH051814Y2 JP H051814 Y2 JPH051814 Y2 JP H051814Y2 JP 10691785 U JP10691785 U JP 10691785U JP 10691785 U JP10691785 U JP 10691785U JP H051814 Y2 JPH051814 Y2 JP H051814Y2
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- inspected
- window
- foreign matter
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 17
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 19
- 235000012431 wafers Nutrition 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 239000000428 dust Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10691785U JPH051814Y2 (pt) | 1985-07-15 | 1985-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10691785U JPH051814Y2 (pt) | 1985-07-15 | 1985-07-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6216463U JPS6216463U (pt) | 1987-01-31 |
| JPH051814Y2 true JPH051814Y2 (pt) | 1993-01-18 |
Family
ID=30982717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10691785U Expired - Lifetime JPH051814Y2 (pt) | 1985-07-15 | 1985-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051814Y2 (pt) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0518368Y2 (pt) * | 1987-11-16 | 1993-05-17 |
-
1985
- 1985-07-15 JP JP10691785U patent/JPH051814Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6216463U (pt) | 1987-01-31 |
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