JPS6216463U - - Google Patents

Info

Publication number
JPS6216463U
JPS6216463U JP10691785U JP10691785U JPS6216463U JP S6216463 U JPS6216463 U JP S6216463U JP 10691785 U JP10691785 U JP 10691785U JP 10691785 U JP10691785 U JP 10691785U JP S6216463 U JPS6216463 U JP S6216463U
Authority
JP
Japan
Prior art keywords
laser beam
inspected
container
foreign matter
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10691785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH051814Y2 (pt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10691785U priority Critical patent/JPH051814Y2/ja
Publication of JPS6216463U publication Critical patent/JPS6216463U/ja
Application granted granted Critical
Publication of JPH051814Y2 publication Critical patent/JPH051814Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10691785U 1985-07-15 1985-07-15 Expired - Lifetime JPH051814Y2 (pt)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10691785U JPH051814Y2 (pt) 1985-07-15 1985-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10691785U JPH051814Y2 (pt) 1985-07-15 1985-07-15

Publications (2)

Publication Number Publication Date
JPS6216463U true JPS6216463U (pt) 1987-01-31
JPH051814Y2 JPH051814Y2 (pt) 1993-01-18

Family

ID=30982717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10691785U Expired - Lifetime JPH051814Y2 (pt) 1985-07-15 1985-07-15

Country Status (1)

Country Link
JP (1) JPH051814Y2 (pt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0518368Y2 (pt) * 1987-11-16 1993-05-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0518368Y2 (pt) * 1987-11-16 1993-05-17

Also Published As

Publication number Publication date
JPH051814Y2 (pt) 1993-01-18

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