JPH0517562B2 - - Google Patents

Info

Publication number
JPH0517562B2
JPH0517562B2 JP57101595A JP10159582A JPH0517562B2 JP H0517562 B2 JPH0517562 B2 JP H0517562B2 JP 57101595 A JP57101595 A JP 57101595A JP 10159582 A JP10159582 A JP 10159582A JP H0517562 B2 JPH0517562 B2 JP H0517562B2
Authority
JP
Japan
Prior art keywords
data
manipulated variables
dry etching
variables
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57101595A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58219601A (ja
Inventor
Kuniaki Matsumoto
Ikuo Matsuba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10159582A priority Critical patent/JPS58219601A/ja
Publication of JPS58219601A publication Critical patent/JPS58219601A/ja
Publication of JPH0517562B2 publication Critical patent/JPH0517562B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Feedback Control In General (AREA)
JP10159582A 1982-06-14 1982-06-14 ドライエツチング制御方式 Granted JPS58219601A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10159582A JPS58219601A (ja) 1982-06-14 1982-06-14 ドライエツチング制御方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10159582A JPS58219601A (ja) 1982-06-14 1982-06-14 ドライエツチング制御方式

Publications (2)

Publication Number Publication Date
JPS58219601A JPS58219601A (ja) 1983-12-21
JPH0517562B2 true JPH0517562B2 (fr) 1993-03-09

Family

ID=14304731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10159582A Granted JPS58219601A (ja) 1982-06-14 1982-06-14 ドライエツチング制御方式

Country Status (1)

Country Link
JP (1) JPS58219601A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7967995B2 (en) * 2008-03-31 2011-06-28 Tokyo Electron Limited Multi-layer/multi-input/multi-output (MLMIMO) models and method for using

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5052477A (fr) * 1973-09-12 1975-05-09
JPS54125374A (en) * 1978-03-24 1979-09-28 Hitachi Ltd Controlling method of plant

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5052477A (fr) * 1973-09-12 1975-05-09
JPS54125374A (en) * 1978-03-24 1979-09-28 Hitachi Ltd Controlling method of plant

Also Published As

Publication number Publication date
JPS58219601A (ja) 1983-12-21

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