JPH0515040B2 - - Google Patents

Info

Publication number
JPH0515040B2
JPH0515040B2 JP62137763A JP13776387A JPH0515040B2 JP H0515040 B2 JPH0515040 B2 JP H0515040B2 JP 62137763 A JP62137763 A JP 62137763A JP 13776387 A JP13776387 A JP 13776387A JP H0515040 B2 JPH0515040 B2 JP H0515040B2
Authority
JP
Japan
Prior art keywords
static
potential
polarity
film
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62137763A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63301495A (ja
Inventor
Shinji Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kasuga Denki Inc
Original Assignee
Kasuga Denki Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kasuga Denki Inc filed Critical Kasuga Denki Inc
Priority to JP13776387A priority Critical patent/JPS63301495A/ja
Publication of JPS63301495A publication Critical patent/JPS63301495A/ja
Publication of JPH0515040B2 publication Critical patent/JPH0515040B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Elimination Of Static Electricity (AREA)
JP13776387A 1987-06-02 1987-06-02 帯電走行物体の除電方法 Granted JPS63301495A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13776387A JPS63301495A (ja) 1987-06-02 1987-06-02 帯電走行物体の除電方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13776387A JPS63301495A (ja) 1987-06-02 1987-06-02 帯電走行物体の除電方法

Publications (2)

Publication Number Publication Date
JPS63301495A JPS63301495A (ja) 1988-12-08
JPH0515040B2 true JPH0515040B2 (enrdf_load_stackoverflow) 1993-02-26

Family

ID=15206261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13776387A Granted JPS63301495A (ja) 1987-06-02 1987-06-02 帯電走行物体の除電方法

Country Status (1)

Country Link
JP (1) JPS63301495A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2651478B2 (ja) * 1994-12-15 1997-09-10 春日電機株式会社 除電除塵方法及び除電除塵装置
DE69506251T2 (de) * 1995-09-25 1999-04-22 Kasuga Denki, Inc., Tokio/Tokyo Verfahren und Vorrichtung für Ladungsabfuhr und Entstaubung
EP1503614A3 (en) * 2003-07-29 2014-10-01 Toray Industries, Inc. A static eliminator and a static eliminating method for an insulating sheet
JP4617757B2 (ja) * 2003-07-29 2011-01-26 東レ株式会社 電気絶縁性シートの除電装置および除電方法、電気絶縁性シートの製造方法、ならびに、電気絶縁性シート
JP4754408B2 (ja) * 2006-05-25 2011-08-24 大日本スクリーン製造株式会社 除電装置、除電方法および該除電装置を備えた基板処理装置

Also Published As

Publication number Publication date
JPS63301495A (ja) 1988-12-08

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