JPH0515029B2 - - Google Patents

Info

Publication number
JPH0515029B2
JPH0515029B2 JP59203318A JP20331884A JPH0515029B2 JP H0515029 B2 JPH0515029 B2 JP H0515029B2 JP 59203318 A JP59203318 A JP 59203318A JP 20331884 A JP20331884 A JP 20331884A JP H0515029 B2 JPH0515029 B2 JP H0515029B2
Authority
JP
Japan
Prior art keywords
objective lens
sample
electron beam
accelerating voltage
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59203318A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6180745A (ja
Inventor
Teruyasu Honma
Katsuyoshi Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP59203318A priority Critical patent/JPS6180745A/ja
Publication of JPS6180745A publication Critical patent/JPS6180745A/ja
Publication of JPH0515029B2 publication Critical patent/JPH0515029B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59203318A 1984-09-28 1984-09-28 電子顕微鏡による結晶試料観察方法 Granted JPS6180745A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59203318A JPS6180745A (ja) 1984-09-28 1984-09-28 電子顕微鏡による結晶試料観察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59203318A JPS6180745A (ja) 1984-09-28 1984-09-28 電子顕微鏡による結晶試料観察方法

Publications (2)

Publication Number Publication Date
JPS6180745A JPS6180745A (ja) 1986-04-24
JPH0515029B2 true JPH0515029B2 (enrdf_load_stackoverflow) 1993-02-26

Family

ID=16472033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59203318A Granted JPS6180745A (ja) 1984-09-28 1984-09-28 電子顕微鏡による結晶試料観察方法

Country Status (1)

Country Link
JP (1) JPS6180745A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2541931B2 (ja) * 1986-05-16 1996-10-09 日本電子株式会社 収束電子線回折装置

Also Published As

Publication number Publication date
JPS6180745A (ja) 1986-04-24

Similar Documents

Publication Publication Date Title
JP6173862B2 (ja) 電子顕微鏡
US7791023B2 (en) Electron holography system
JPH0594798A (ja) 焦点深度切り換え可能な電子顕微鏡等の電子光学観察装置
US4633085A (en) Transmission-type electron microscope
JPH0515029B2 (enrdf_load_stackoverflow)
US4316087A (en) Method of photographing electron microscope images on a single photographic plate and apparatus therefor
JPS5727551A (en) Electron microscope
JP2839683B2 (ja) フーコー電子顕微鏡
JPH01276552A (ja) 電子顕微鏡
JPS626300B2 (enrdf_load_stackoverflow)
JPH11264940A (ja) 試料高さ合わせ調整装置
JPS58214257A (ja) 電子顕微鏡等の磁区観察装置
JPS5919408B2 (ja) 電子顕微鏡
JPH04336B2 (enrdf_load_stackoverflow)
EP4220680A1 (en) Charged-particle beam device for diffraction analysis
US20240355577A1 (en) Charged-particle beam device for diffraction analysis
JP2007080724A (ja) 電子顕微鏡の磁場印加装置
JPS6029187B2 (ja) 電子顕微鏡
JPS585321Y2 (ja) 電子顕微鏡
JPS6329928B2 (enrdf_load_stackoverflow)
KR0129960Y1 (ko) 투과전자현미경의 조사계
JPH0619964B2 (ja) 電子顕微鏡
JP2541931B2 (ja) 収束電子線回折装置
JP2003007246A (ja) 電子顕微鏡
JPH0378738B2 (enrdf_load_stackoverflow)