JPS6180745A - 電子顕微鏡による結晶試料観察方法 - Google Patents

電子顕微鏡による結晶試料観察方法

Info

Publication number
JPS6180745A
JPS6180745A JP59203318A JP20331884A JPS6180745A JP S6180745 A JPS6180745 A JP S6180745A JP 59203318 A JP59203318 A JP 59203318A JP 20331884 A JP20331884 A JP 20331884A JP S6180745 A JPS6180745 A JP S6180745A
Authority
JP
Japan
Prior art keywords
electron beam
sample
object lens
objective lens
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59203318A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0515029B2 (enrdf_load_stackoverflow
Inventor
Teruyasu Honma
本間　照康
Katsuyoshi Ueno
植野　勝義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP59203318A priority Critical patent/JPS6180745A/ja
Publication of JPS6180745A publication Critical patent/JPS6180745A/ja
Publication of JPH0515029B2 publication Critical patent/JPH0515029B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59203318A 1984-09-28 1984-09-28 電子顕微鏡による結晶試料観察方法 Granted JPS6180745A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59203318A JPS6180745A (ja) 1984-09-28 1984-09-28 電子顕微鏡による結晶試料観察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59203318A JPS6180745A (ja) 1984-09-28 1984-09-28 電子顕微鏡による結晶試料観察方法

Publications (2)

Publication Number Publication Date
JPS6180745A true JPS6180745A (ja) 1986-04-24
JPH0515029B2 JPH0515029B2 (enrdf_load_stackoverflow) 1993-02-26

Family

ID=16472033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59203318A Granted JPS6180745A (ja) 1984-09-28 1984-09-28 電子顕微鏡による結晶試料観察方法

Country Status (1)

Country Link
JP (1) JPS6180745A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271338A (ja) * 1986-05-16 1987-11-25 Jeol Ltd 収束電子線回折装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271338A (ja) * 1986-05-16 1987-11-25 Jeol Ltd 収束電子線回折装置

Also Published As

Publication number Publication date
JPH0515029B2 (enrdf_load_stackoverflow) 1993-02-26

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