JPH05148068A - ダイヤモンドまたはダイヤモンド状炭素被覆硬質材料 - Google Patents

ダイヤモンドまたはダイヤモンド状炭素被覆硬質材料

Info

Publication number
JPH05148068A
JPH05148068A JP4048299A JP4829992A JPH05148068A JP H05148068 A JPH05148068 A JP H05148068A JP 4048299 A JP4048299 A JP 4048299A JP 4829992 A JP4829992 A JP 4829992A JP H05148068 A JPH05148068 A JP H05148068A
Authority
JP
Japan
Prior art keywords
diamond
hard material
intermediate layer
carbon
coating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4048299A
Other languages
English (en)
Japanese (ja)
Inventor
Naoya Omori
直也 大森
Toshio Nomura
俊雄 野村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12668463&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH05148068(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of JPH05148068A publication Critical patent/JPH05148068A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0254—Physical treatment to alter the texture of the surface, e.g. scratching or polishing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP4048299A 1991-03-08 1992-03-05 ダイヤモンドまたはダイヤモンド状炭素被覆硬質材料 Pending JPH05148068A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4360591 1991-03-08
JP3-43605 1991-03-08

Publications (1)

Publication Number Publication Date
JPH05148068A true JPH05148068A (ja) 1993-06-15

Family

ID=12668463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4048299A Pending JPH05148068A (ja) 1991-03-08 1992-03-05 ダイヤモンドまたはダイヤモンド状炭素被覆硬質材料

Country Status (4)

Country Link
EP (1) EP0503822B2 (enExample)
JP (1) JPH05148068A (enExample)
CA (1) CA2061944C (enExample)
DE (1) DE69210874T3 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008280198A (ja) * 2007-05-09 2008-11-20 Nachi Fujikoshi Corp ダイヤモンド膜被覆部材およびその製造方法
WO2011152122A1 (ja) * 2010-05-31 2011-12-08 株式会社ジェイテクト 被覆部材およびその製造方法
JP2025530144A (ja) * 2022-09-05 2025-09-11 カーボンコンピテンス ゲーエムベーハー 中間層及びダイヤモンド層でコーティングされた基板を調製するための方法

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5626963A (en) * 1993-07-07 1997-05-06 Sanyo Electric Co., Ltd. Hard-carbon-film-coated substrate and apparatus for forming the same
US5691010A (en) * 1993-10-19 1997-11-25 Sanyo Electric Co., Ltd. Arc discharge plasma CVD method for forming diamond-like carbon films
US5482602A (en) * 1993-11-04 1996-01-09 United Technologies Corporation Broad-beam ion deposition coating methods for depositing diamond-like-carbon coatings on dynamic surfaces
CA2150739A1 (en) * 1994-06-14 1995-12-15 Deepak G. Bhat Method of depositing a composite diamond coating onto a hard substrate
DE19545050C2 (de) * 1994-12-07 1999-10-21 Inovap Vakuum Und Plasmatechni Verfahren und Einrichtung zur Abscheidung von Funktionsschichten auf einem Substrat mittels plasmagestützter Schichtabscheidung
DE19738234C1 (de) 1997-09-02 1998-10-22 Fraunhofer Ges Forschung Einrichtung zum Aufstäuben von Hartstoffschichten
JP4593852B2 (ja) * 1999-06-21 2010-12-08 住友電工ハードメタル株式会社 被覆硬質合金
JP4070417B2 (ja) * 2000-03-31 2008-04-02 日本特殊陶業株式会社 窒化珪素質部材及びその製造方法並びに切削工具
FR2827309B1 (fr) * 2001-07-13 2004-05-14 Centre Nat Rech Scient Procede de fabrication de materiaux composites diamantes
DE10243104A1 (de) 2002-09-17 2004-03-25 Gebr. Brasseler Gmbh & Co. Kg Rotierendes Instrument aus Keramik
JP4293370B2 (ja) * 2005-02-02 2009-07-08 株式会社リケン バルブリフター
DE102006015520A1 (de) * 2006-03-31 2007-10-04 Süddeutsche Feinmechanik GmbH Verfahren zum Verbinden einer Kanüle mit einem Griff
JP4704950B2 (ja) * 2006-04-27 2011-06-22 株式会社神戸製鋼所 非晶質炭素系硬質多層膜及びこの膜を表面に備えた硬質表面部材
IL205090A0 (en) * 2010-04-14 2010-11-30 Iscar Ltd Hard carbon coating and method of forming the same
JP2013532227A (ja) 2010-04-30 2013-08-15 セメコン アーゲー 被覆された物体及び物体の被覆方法
US9034466B2 (en) * 2010-07-09 2015-05-19 Daido Metal Company Ltd. Sliding member
JP5453532B2 (ja) * 2010-07-09 2014-03-26 大同メタル工業株式会社 摺動部材
US8657894B2 (en) 2011-04-15 2014-02-25 Longyear Tm, Inc. Use of resonant mixing to produce impregnated bits
EP3144412A1 (de) * 2015-09-15 2017-03-22 HILTI Aktiengesellschaft Schneidplatte und herstellungsverfahren
CN108486545A (zh) * 2018-05-07 2018-09-04 中煤第三建设（集团）有限责任公司 一种耐腐蚀盾构机刀具
CN110129763A (zh) * 2019-06-24 2019-08-16 南京航空航天大学 一种基于碳化后超声处理的钛基金刚石涂层结合力增强方法
CN115110023A (zh) * 2021-03-23 2022-09-27 东莞新科技术研究开发有限公司 一种触控屏幕表面的镀膜方法
CN116180043A (zh) * 2021-11-26 2023-05-30 东莞新科技术研究开发有限公司 触摸屏的镀膜方法
CN116410019A (zh) * 2022-01-05 2023-07-11 北京小米移动软件有限公司 陶瓷件的制作方法、陶瓷件及电子设备
CN114892228A (zh) * 2022-06-09 2022-08-12 赣州海盛硬质合金有限公司 一种金刚石涂层硬质合金的加工方法
FR3155943B1 (fr) * 2023-11-24 2026-01-02 Focal Jmlab Membrane acoustique pour transducteur acoustique et transducteur acoustique associe
CN118979220B (zh) * 2024-08-07 2025-09-23 广东省科学院新材料研究所 一种硅掺杂类金刚石复合润滑涂层及其制备方法与应用
CN119194354B (zh) * 2024-09-27 2026-03-20 广州博森盾技术有限公司 立方氮化硼薄膜结构、切削工具及其制造方法与设备
CN121320900B (zh) * 2025-12-17 2026-03-17 艾瑞森表面技术（苏州）股份有限公司 一种钻针涂层及其制备方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58126972A (ja) * 1982-01-22 1983-07-28 Sumitomo Electric Ind Ltd ダイヤモンド被覆超硬合金工具
SE453474B (sv) † 1984-06-27 1988-02-08 Santrade Ltd Kompoundkropp belagd med skikt av polykristallin diamant

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008280198A (ja) * 2007-05-09 2008-11-20 Nachi Fujikoshi Corp ダイヤモンド膜被覆部材およびその製造方法
WO2011152122A1 (ja) * 2010-05-31 2011-12-08 株式会社ジェイテクト 被覆部材およびその製造方法
JP5892387B2 (ja) * 2010-05-31 2016-03-23 株式会社ジェイテクト 被覆部材の製造方法
JP2025530144A (ja) * 2022-09-05 2025-09-11 カーボンコンピテンス ゲーエムベーハー 中間層及びダイヤモンド層でコーティングされた基板を調製するための方法

Also Published As

Publication number Publication date
DE69210874D1 (de) 1996-06-27
CA2061944C (en) 1999-01-26
EP0503822B2 (en) 1999-11-03
DE69210874T3 (de) 2000-04-20
DE69210874T2 (de) 1996-10-02
EP0503822B1 (en) 1996-05-22
EP0503822A3 (enExample) 1994-04-13
EP0503822A2 (en) 1992-09-16
CA2061944A1 (en) 1992-09-09

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