JPH0514452Y2 - - Google Patents

Info

Publication number
JPH0514452Y2
JPH0514452Y2 JP215387U JP215387U JPH0514452Y2 JP H0514452 Y2 JPH0514452 Y2 JP H0514452Y2 JP 215387 U JP215387 U JP 215387U JP 215387 U JP215387 U JP 215387U JP H0514452 Y2 JPH0514452 Y2 JP H0514452Y2
Authority
JP
Japan
Prior art keywords
emitter
electrode
accelerating
voltage
orifice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP215387U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63111750U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP215387U priority Critical patent/JPH0514452Y2/ja
Publication of JPS63111750U publication Critical patent/JPS63111750U/ja
Application granted granted Critical
Publication of JPH0514452Y2 publication Critical patent/JPH0514452Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP215387U 1987-01-10 1987-01-10 Expired - Lifetime JPH0514452Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP215387U JPH0514452Y2 (enrdf_load_html_response) 1987-01-10 1987-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP215387U JPH0514452Y2 (enrdf_load_html_response) 1987-01-10 1987-01-10

Publications (2)

Publication Number Publication Date
JPS63111750U JPS63111750U (enrdf_load_html_response) 1988-07-18
JPH0514452Y2 true JPH0514452Y2 (enrdf_load_html_response) 1993-04-16

Family

ID=30780724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP215387U Expired - Lifetime JPH0514452Y2 (enrdf_load_html_response) 1987-01-10 1987-01-10

Country Status (1)

Country Link
JP (1) JPH0514452Y2 (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007067296A2 (en) * 2005-12-02 2007-06-14 Alis Corporation Ion sources, systems and methods
JP4991410B2 (ja) * 2006-07-06 2012-08-01 株式会社日立ハイテクノロジーズ 集束イオンビーム装置
JP4982161B2 (ja) * 2006-11-30 2012-07-25 株式会社日立ハイテクノロジーズ ガス電界電離イオン源、及び走査荷電粒子顕微鏡

Also Published As

Publication number Publication date
JPS63111750U (enrdf_load_html_response) 1988-07-18

Similar Documents

Publication Publication Date Title
US20070215802A1 (en) Systems and methods for a gas field ion microscope
US8330130B2 (en) Charged particle source with automated tip formation
JPH10223574A (ja) 加工観察装置
US3196246A (en) Means for observing a workpiece in electron beam machining apparatus
JP3323021B2 (ja) 走査形電子顕微鏡及びそれを用いた試料像観察方法
JP2008508684A5 (enrdf_load_html_response)
JP7349011B2 (ja) 電子銃及び電子顕微鏡
JP5680842B2 (ja) 荷電粒子ビーム処理システムで使用される自己バイアス能動負荷回路及び関連する電源
JP2926132B1 (ja) 集束イオンビームによる二次イオン像観察方法
JPH07192669A (ja) 電界電離型ガスフェーズイオン源の調整方法
JPH0514452Y2 (enrdf_load_html_response)
JP3766793B2 (ja) 走査電子顕微鏡
JP2000133183A (ja) 荷電粒子線装置
JP2001126655A5 (enrdf_load_html_response)
US4020387A (en) Field emission electron gun
JPH09274883A (ja) Ｆｉｂ／ｓｅｍ複合装置
US3931519A (en) Field emission electron gun
US3931517A (en) Field emission electron gun
KR100293619B1 (ko) 영상 디스플레이 장치용 영상 캐스팅 제어 방법 및 영상 디스플레이 장치
JPH10241588A (ja) 集束イオンビーム加工方法およびその装置
JPS6325660B2 (enrdf_load_html_response)
JP2672808B2 (ja) イオンビーム加工装置
JP3524737B2 (ja) 電子銃及び電子線装置
JPH0448627Y2 (enrdf_load_html_response)
US3925664A (en) Field emission electron gun