JPS63111750U - - Google Patents

Info

Publication number
JPS63111750U
JPS63111750U JP215387U JP215387U JPS63111750U JP S63111750 U JPS63111750 U JP S63111750U JP 215387 U JP215387 U JP 215387U JP 215387 U JP215387 U JP 215387U JP S63111750 U JPS63111750 U JP S63111750U
Authority
JP
Japan
Prior art keywords
voltage
emitter
accelerating
power source
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP215387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0514452Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP215387U priority Critical patent/JPH0514452Y2/ja
Publication of JPS63111750U publication Critical patent/JPS63111750U/ja
Application granted granted Critical
Publication of JPH0514452Y2 publication Critical patent/JPH0514452Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP215387U 1987-01-10 1987-01-10 Expired - Lifetime JPH0514452Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP215387U JPH0514452Y2 (enrdf_load_html_response) 1987-01-10 1987-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP215387U JPH0514452Y2 (enrdf_load_html_response) 1987-01-10 1987-01-10

Publications (2)

Publication Number Publication Date
JPS63111750U true JPS63111750U (enrdf_load_html_response) 1988-07-18
JPH0514452Y2 JPH0514452Y2 (enrdf_load_html_response) 1993-04-16

Family

ID=30780724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP215387U Expired - Lifetime JPH0514452Y2 (enrdf_load_html_response) 1987-01-10 1987-01-10

Country Status (1)

Country Link
JP (1) JPH0514452Y2 (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008034371A (ja) * 2006-07-06 2008-02-14 Hitachi High-Technologies Corp 集束イオンビーム装置
JP2008140557A (ja) * 2006-11-30 2008-06-19 Hitachi High-Technologies Corp ガス電界電離イオン源、及び走査荷電粒子顕微鏡
JP2012138360A (ja) * 2005-12-02 2012-07-19 Arisu Corporation:Kk イオン源、システム及び方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012138360A (ja) * 2005-12-02 2012-07-19 Arisu Corporation:Kk イオン源、システム及び方法
JP2008034371A (ja) * 2006-07-06 2008-02-14 Hitachi High-Technologies Corp 集束イオンビーム装置
JP2008140557A (ja) * 2006-11-30 2008-06-19 Hitachi High-Technologies Corp ガス電界電離イオン源、及び走査荷電粒子顕微鏡

Also Published As

Publication number Publication date
JPH0514452Y2 (enrdf_load_html_response) 1993-04-16

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