JPH0513115B2 - - Google Patents

Info

Publication number

JPH0513115B2

JPH0513115B2 JP26426384A JP26426384A JPH0513115B2 JP H0513115 B2 JPH0513115 B2 JP H0513115B2 JP 26426384 A JP26426384 A JP 26426384A JP 26426384 A JP26426384 A JP 26426384A JP H0513115 B2 JPH0513115 B2 JP H0513115B2

Authority

JP

Japan

Prior art keywords

ceramic

weight

sintered body

molybdenum

silicon nitride

Prior art date

1984-12-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 239000000919 ceramic Substances 0.000 claims description 31
• 238000000034 method Methods 0.000 claims description 19
• 229910052581 Si3N4 Inorganic materials 0.000 claims description 16
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 16
• CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 14
• ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 13
• 239000000203 mixture Substances 0.000 claims description 13
• 229910052750 molybdenum Inorganic materials 0.000 claims description 13
• 239000011733 molybdenum Substances 0.000 claims description 13
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 12
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 9
• 229910000502 Li-aluminosilicate Inorganic materials 0.000 claims description 9
• 239000007769 metal material Substances 0.000 claims description 7
• 229910052596 spinel Inorganic materials 0.000 claims description 7
• 239000011029 spinel Substances 0.000 claims description 7
• 239000000395 magnesium oxide Substances 0.000 claims description 6
• 239000001257 hydrogen Substances 0.000 claims description 4
• 229910052739 hydrogen Inorganic materials 0.000 claims description 4
• 229910052757 nitrogen Inorganic materials 0.000 claims description 4
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
• 238000010304 firing Methods 0.000 claims description 2
• 238000001465 metallisation Methods 0.000 claims 3
• 238000002156 mixing Methods 0.000 claims 2
• 239000003607 modifier Substances 0.000 claims 2
• 229910010293 ceramic material Inorganic materials 0.000 description 11
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
• 239000011248 coating agent Substances 0.000 description 4
• 238000000576 coating method Methods 0.000 description 4
• 239000000843 powder Substances 0.000 description 4
• 238000010438 heat treatment Methods 0.000 description 3
• 239000002994 raw material Substances 0.000 description 3
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 229910052751 metal Inorganic materials 0.000 description 2
• 239000002184 metal Substances 0.000 description 2
• ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 description 1
• 239000005995 Aluminium silicate Substances 0.000 description 1
• ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
• 229910018068 Li 2 O Inorganic materials 0.000 description 1
• PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
• 239000000654 additive Substances 0.000 description 1
• 235000012211 aluminium silicate Nutrition 0.000 description 1
• 229910052786 argon Inorganic materials 0.000 description 1
• 238000005219 brazing Methods 0.000 description 1
• 239000000292 calcium oxide Substances 0.000 description 1
• 235000012255 calcium oxide Nutrition 0.000 description 1
• OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 description 1
• 230000006866 deterioration Effects 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000007731 hot pressing Methods 0.000 description 1
• 150000002431 hydrogen Chemical class 0.000 description 1
• 239000011261 inert gas Substances 0.000 description 1
• NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
• 229910052748 manganese Inorganic materials 0.000 description 1
• 239000011572 manganese Substances 0.000 description 1
• 150000004767 nitrides Chemical class 0.000 description 1
• 239000003960 organic solvent Substances 0.000 description 1
• 238000007747 plating Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 229910001958 silver carbonate Inorganic materials 0.000 description 1
• LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 description 1
• 238000005245 sintering Methods 0.000 description 1
• 238000005476 soldering Methods 0.000 description 1
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
• 229910052721 tungsten Inorganic materials 0.000 description 1
• 239000010937 tungsten Substances 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
• 229910052727 yttrium Inorganic materials 0.000 description 1
• VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1