JPH0513005Y2 - - Google Patents

Info

Publication number
JPH0513005Y2
JPH0513005Y2 JP1986015251U JP1525186U JPH0513005Y2 JP H0513005 Y2 JPH0513005 Y2 JP H0513005Y2 JP 1986015251 U JP1986015251 U JP 1986015251U JP 1525186 U JP1525186 U JP 1525186U JP H0513005 Y2 JPH0513005 Y2 JP H0513005Y2
Authority
JP
Japan
Prior art keywords
plasma generation
waveguide
generation chamber
plasma
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986015251U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62126831U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986015251U priority Critical patent/JPH0513005Y2/ja
Publication of JPS62126831U publication Critical patent/JPS62126831U/ja
Application granted granted Critical
Publication of JPH0513005Y2 publication Critical patent/JPH0513005Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
JP1986015251U 1986-02-04 1986-02-04 Expired - Lifetime JPH0513005Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986015251U JPH0513005Y2 (enrdf_load_stackoverflow) 1986-02-04 1986-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986015251U JPH0513005Y2 (enrdf_load_stackoverflow) 1986-02-04 1986-02-04

Publications (2)

Publication Number Publication Date
JPS62126831U JPS62126831U (enrdf_load_stackoverflow) 1987-08-12
JPH0513005Y2 true JPH0513005Y2 (enrdf_load_stackoverflow) 1993-04-06

Family

ID=30806010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986015251U Expired - Lifetime JPH0513005Y2 (enrdf_load_stackoverflow) 1986-02-04 1986-02-04

Country Status (1)

Country Link
JP (1) JPH0513005Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131450A (ja) * 1984-11-30 1986-06-19 Canon Inc ドライエツチング装置

Also Published As

Publication number Publication date
JPS62126831U (enrdf_load_stackoverflow) 1987-08-12

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