JPH0512864B2 - - Google Patents
Info
- Publication number
- JPH0512864B2 JPH0512864B2 JP58160374A JP16037483A JPH0512864B2 JP H0512864 B2 JPH0512864 B2 JP H0512864B2 JP 58160374 A JP58160374 A JP 58160374A JP 16037483 A JP16037483 A JP 16037483A JP H0512864 B2 JPH0512864 B2 JP H0512864B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- lens
- microlens
- pattern
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 52
- 238000001312 dry etching Methods 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 120
- 239000010408 film Substances 0.000 description 52
- 229920002454 poly(glycidyl methacrylate) polymer Polymers 0.000 description 44
- 238000005530 etching Methods 0.000 description 35
- 239000011347 resin Substances 0.000 description 33
- 229920005989 resin Polymers 0.000 description 33
- 229920002120 photoresistant polymer Polymers 0.000 description 32
- 239000003431 cross linking reagent Substances 0.000 description 23
- 239000000243 solution Substances 0.000 description 21
- 238000012545 processing Methods 0.000 description 20
- 238000004132 cross linking Methods 0.000 description 17
- 230000006378 damage Effects 0.000 description 17
- 239000007789 gas Substances 0.000 description 16
- 230000008569 process Effects 0.000 description 16
- 238000010586 diagram Methods 0.000 description 15
- 238000001020 plasma etching Methods 0.000 description 15
- 229910004298 SiO 2 Inorganic materials 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 13
- 239000000758 substrate Substances 0.000 description 11
- SRUQARLMFOLRDN-UHFFFAOYSA-N 1-(2,4,5-Trihydroxyphenyl)-1-butanone Chemical compound CCCC(=O)C1=CC(O)=C(O)C=C1O SRUQARLMFOLRDN-UHFFFAOYSA-N 0.000 description 10
- 102100039386 Ketimine reductase mu-crystallin Human genes 0.000 description 10
- 101000772180 Lithobates catesbeianus Transthyretin Proteins 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 238000011282 treatment Methods 0.000 description 10
- 238000000576 coating method Methods 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 230000007547 defect Effects 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000009499 grossing Methods 0.000 description 7
- 230000007261 regionalization Effects 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 230000005856 abnormality Effects 0.000 description 5
- 238000000149 argon plasma sintering Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 238000011109 contamination Methods 0.000 description 5
- 229910052500 inorganic mineral Inorganic materials 0.000 description 5
- 239000011707 mineral Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000004925 Acrylic resin Substances 0.000 description 4
- 229920000178 Acrylic resin Polymers 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 4
- 239000004926 polymethyl methacrylate Substances 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 108010010803 Gelatin Proteins 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 3
- 238000004380 ashing Methods 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- 238000001444 catalytic combustion detection Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 229920000159 gelatin Polymers 0.000 description 3
- 239000008273 gelatin Substances 0.000 description 3
- 235000019322 gelatine Nutrition 0.000 description 3
- 235000011852 gelatine desserts Nutrition 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000005416 organic matter Substances 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- CTKINSOISVBQLD-UHFFFAOYSA-N Glycidol Chemical compound OCC1CO1 CTKINSOISVBQLD-UHFFFAOYSA-N 0.000 description 2
- 238000007259 addition reaction Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 150000007524 organic acids Chemical class 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- HLLSOEKIMZEGFV-UHFFFAOYSA-N 4-(dibutylsulfamoyl)benzoic acid Chemical compound CCCCN(CCCC)S(=O)(=O)C1=CC=C(C(O)=O)C=C1 HLLSOEKIMZEGFV-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 150000001555 benzenes Chemical class 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical class C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000005243 fluidization Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- LYKRPDCJKSXAHS-UHFFFAOYSA-N phenyl-(2,3,4,5-tetrahydroxyphenyl)methanone Chemical compound OC1=C(O)C(O)=CC(C(=O)C=2C=CC=CC=2)=C1O LYKRPDCJKSXAHS-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000012756 surface treatment agent Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Couplings Of Light Guides (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58160374A JPS6053073A (ja) | 1983-09-02 | 1983-09-02 | ãã€ã¯ãã¬ã³ãºä»åºäœæ®åçŽ åããã³è£œæ³ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58160374A JPS6053073A (ja) | 1983-09-02 | 1983-09-02 | ãã€ã¯ãã¬ã³ãºä»åºäœæ®åçŽ åããã³è£œæ³ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6053073A JPS6053073A (ja) | 1985-03-26 |
| JPH0512864B2 true JPH0512864B2 (ja) | 1993-02-19 |
Family
ID=15713583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58160374A Granted JPS6053073A (ja) | 1983-09-02 | 1983-09-02 | ãã€ã¯ãã¬ã³ãºä»åºäœæ®åçŽ åããã³è£œæ³ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6053073A (ja) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2826317B2 (ja) * | 1988-03-31 | 1998-11-18 | æ ªåŒäŒç€Ÿæ±è | åºäœæ®åè£ çœ®åã³ãã®è£œé æ¹æ³ |
| US4966831A (en) * | 1989-04-20 | 1990-10-30 | Eastman Kodak Company | Lens arrays for light sensitive devices |
| JP3200856B2 (ja) * | 1991-02-12 | 2001-08-20 | ãœããŒæ ªåŒäŒç€Ÿ | åºäœæ®åè£ çœ® |
| JPH0567762A (ja) * | 1991-03-06 | 1993-03-19 | Matsushita Electron Corp | åºäœæ®åè£ çœ®ããã³ãã®è£œé æ¹æ³ |
| JPH05335531A (ja) * | 1992-05-27 | 1993-12-17 | Sharp Corp | åºäœæ®åè£ çœ® |
| USRE42918E1 (en) | 1994-01-28 | 2011-11-15 | California Institute Of Technology | Single substrate camera device with CMOS image sensor |
| US6570617B2 (en) | 1994-01-28 | 2003-05-27 | California Institute Of Technology | CMOS active pixel sensor type imaging system on a chip |
| KR0147401B1 (ko) * | 1994-02-23 | 1998-08-01 | êµ¬ë³žì€ | ê³ ì²ŽìŽ¬ììì ë° ê·ž ì ì¡°ë°©ë² |
| EP0706070A3 (de) * | 1994-10-04 | 1997-04-02 | Siemens Ag | Verfahren zum TrockenÀtzen eines Halbleitersubstrats |
| JP4123667B2 (ja) | 2000-01-26 | 2008-07-23 | åžçå°å·æ ªåŒäŒç€Ÿ | åºäœæ®åçŽ åã®è£œé æ¹æ³ |
| US6524772B1 (en) * | 2001-08-30 | 2003-02-25 | United Microelectronics Corp. | Method of manufacturing phase grating image sensor |
| JP4830306B2 (ja) | 2004-06-23 | 2011-12-07 | åžçå°å·æ ªåŒäŒç€Ÿ | åºäœæ®åçŽ åã®è£œé æ¹æ³ |
| JP2007127981A (ja) * | 2005-11-07 | 2007-05-24 | Sharp Corp | ãã€ã¯ãã¬ã³ãºã¢ã¬ã€ããã³ãã®åœ¢ææ¹æ³ãåºäœæ®åçŽ åã液æ¶è¡šç€ºè£ 眮ãé»åæ å ±æ©åš |
| WO2007116887A1 (ja) | 2006-04-03 | 2007-10-18 | Toppan Printing Co., Ltd. | ã«ã©ãŒæ®åçŽ ååã³ã«ã©ãŒæ®åçŽ å補é æ¹æ³ |
| JP5122634B2 (ja) * | 2010-11-18 | 2013-01-16 | æ¥ç«ãã¯ã»ã«æ ªåŒäŒç€Ÿ | ã«ã¡ã©ã¢ãžã¥ãŒã« |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5374395A (en) * | 1976-12-15 | 1978-07-01 | Matsushita Electric Ind Co Ltd | Solid state pickup device |
| JPS55124366A (en) * | 1979-03-19 | 1980-09-25 | Fuji Photo Film Co Ltd | Pickup device |
| JPS5775431A (en) * | 1980-10-28 | 1982-05-12 | Fujitsu Ltd | Formation of pattern |
| JPS5855909A (ja) * | 1981-09-29 | 1983-04-02 | Takeomi Suzuki | å åŠåæ€åºè£ 眮 |
-
1983
- 1983-09-02 JP JP58160374A patent/JPS6053073A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5374395A (en) * | 1976-12-15 | 1978-07-01 | Matsushita Electric Ind Co Ltd | Solid state pickup device |
| JPS55124366A (en) * | 1979-03-19 | 1980-09-25 | Fuji Photo Film Co Ltd | Pickup device |
| JPS5775431A (en) * | 1980-10-28 | 1982-05-12 | Fujitsu Ltd | Formation of pattern |
| JPS5855909A (ja) * | 1981-09-29 | 1983-04-02 | Takeomi Suzuki | å åŠåæ€åºè£ 眮 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6053073A (ja) | 1985-03-26 |
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